InGaZnO 和 InSnO 薄膜晶体管的耐久性和可靠性机理研究

IF 4.6 Q2 MATERIALS SCIENCE, BIOMATERIALS ACS Applied Bio Materials Pub Date : 2024-07-18 DOI:10.1109/JEDS.2024.3431289
Jie Luo;Yanyu Yang;Gangping Yan;Chuqiao Niu;Yunjiao Bao;Yupeng Lu;Zhengying Jiao;Jinjuan Xiang;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo
{"title":"InGaZnO 和 InSnO 薄膜晶体管的耐久性和可靠性机理研究","authors":"Jie Luo;Yanyu Yang;Gangping Yan;Chuqiao Niu;Yunjiao Bao;Yupeng Lu;Zhengying Jiao;Jinjuan Xiang;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo","doi":"10.1109/JEDS.2024.3431289","DOIUrl":null,"url":null,"abstract":"Amorphous oxide semiconductor-thin film transistors (AOS-TFTs) have attracted considerable attention due to their impressive performance in various applications. However, there is a limited amount of study available on the reliability of AOS-TFTs. This work investigates the endurance and reliability mechanisms of Indium Gallium Zinc Oxide (IGZO) and Indium Tin Oxide (ITO) TFTs. The devices underwent a range of test conditions to evaluate their endurance properties. The study utilized Zero-Bias Endurance Tests (ZBET) to examine the fluctuating behaviors of threshold voltage, revealing valuable insights into the causes of electrical instability. The study highlights the crucial importance of electron depletion and restoration dynamics in affecting the reliability of TFTs. Additionally, the study found differences in the performance of IGZO-TFTs and ITO-TFTs, suggesting that the differing features of the materials have a significant impact on the endurance and reliability of TFTs.","PeriodicalId":2,"journal":{"name":"ACS Applied Bio Materials","volume":null,"pages":null},"PeriodicalIF":4.6000,"publicationDate":"2024-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10604821","citationCount":"0","resultStr":"{\"title\":\"The Endurance and Reliability Mechanisms Investigation of InGaZnO and InSnO Thin Film Transistors\",\"authors\":\"Jie Luo;Yanyu Yang;Gangping Yan;Chuqiao Niu;Yunjiao Bao;Yupeng Lu;Zhengying Jiao;Jinjuan Xiang;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo\",\"doi\":\"10.1109/JEDS.2024.3431289\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Amorphous oxide semiconductor-thin film transistors (AOS-TFTs) have attracted considerable attention due to their impressive performance in various applications. However, there is a limited amount of study available on the reliability of AOS-TFTs. This work investigates the endurance and reliability mechanisms of Indium Gallium Zinc Oxide (IGZO) and Indium Tin Oxide (ITO) TFTs. The devices underwent a range of test conditions to evaluate their endurance properties. The study utilized Zero-Bias Endurance Tests (ZBET) to examine the fluctuating behaviors of threshold voltage, revealing valuable insights into the causes of electrical instability. The study highlights the crucial importance of electron depletion and restoration dynamics in affecting the reliability of TFTs. Additionally, the study found differences in the performance of IGZO-TFTs and ITO-TFTs, suggesting that the differing features of the materials have a significant impact on the endurance and reliability of TFTs.\",\"PeriodicalId\":2,\"journal\":{\"name\":\"ACS Applied Bio Materials\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.6000,\"publicationDate\":\"2024-07-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10604821\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ACS Applied Bio Materials\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10604821/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, BIOMATERIALS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ACS Applied Bio Materials","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10604821/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, BIOMATERIALS","Score":null,"Total":0}
引用次数: 0

摘要

非晶氧化物半导体薄膜晶体管(AOS-TFT)因其在各种应用中的出色性能而备受关注。然而,有关 AOS-TFT 可靠性的研究却十分有限。这项研究调查了氧化铟镓锌(IGZO)和氧化铟锡(ITO)TFT 的耐久性和可靠性机制。这些器件经历了一系列测试条件,以评估其耐久性能。该研究利用零偏压耐久性测试 (ZBET) 来检查阈值电压的波动行为,从而揭示了电气不稳定性的宝贵原因。该研究强调了电子耗尽和恢复动态对影响 TFT 可靠性的至关重要性。此外,研究还发现了 IGZO-TFT 和 ITO-TFT 的性能差异,表明材料的不同特性对 TFT 的耐久性和可靠性有重大影响。
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The Endurance and Reliability Mechanisms Investigation of InGaZnO and InSnO Thin Film Transistors
Amorphous oxide semiconductor-thin film transistors (AOS-TFTs) have attracted considerable attention due to their impressive performance in various applications. However, there is a limited amount of study available on the reliability of AOS-TFTs. This work investigates the endurance and reliability mechanisms of Indium Gallium Zinc Oxide (IGZO) and Indium Tin Oxide (ITO) TFTs. The devices underwent a range of test conditions to evaluate their endurance properties. The study utilized Zero-Bias Endurance Tests (ZBET) to examine the fluctuating behaviors of threshold voltage, revealing valuable insights into the causes of electrical instability. The study highlights the crucial importance of electron depletion and restoration dynamics in affecting the reliability of TFTs. Additionally, the study found differences in the performance of IGZO-TFTs and ITO-TFTs, suggesting that the differing features of the materials have a significant impact on the endurance and reliability of TFTs.
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来源期刊
ACS Applied Bio Materials
ACS Applied Bio Materials Chemistry-Chemistry (all)
CiteScore
9.40
自引率
2.10%
发文量
464
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