锡/铜界面反应中 Ni-W 层的扩散阻隔性能

Materials Pub Date : 2024-07-25 DOI:10.3390/ma17153682
Jinye Yao, Chenyu Li, M. Shang, Xiangxu Chen, Yunpeng Wang, Haoran Ma, Haitao Ma, Xiaoying Liu
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The following paper presents the electrodeposition of a Ni-W layer on a Cu substrate, forming a barrier layer. Subsequently, the barrier properties between the Sn/Cu reactive couples were subjected to a comprehensive and systematic investigation. The study indicates that the Ni-W layer has the capacity to impede the diffusion of Sn atoms into Cu. Furthermore, the Ni-W layer is a viable diffusion barrier at the Sn/Cu interface. The “bright layer” Ni2WSn4 can be observed in all Ni-W coatings during the soldering reflow process, and its growth was almost linear. The structure of the Ni-W layer is such that it reduces the barrier properties that would otherwise be inherent to it. This is due to the “bright layer” Ni2WSn4 that covers the original Ni-W barrier layer. At a temperature of 300 °C for a duration of 600 s, the Ni-W barrier layer loses its blocking function. 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引用次数: 0

摘要

随着三维集成电路 (IC) 芯片集成度的提高和微凸块尺寸的缩小,电迁移和热迁移导致的服务可靠性问题越来越普遍。在焊点的实际应用中,已观察到金属间化合物 (IMC) 的晶粒尺寸在回流过程中增大。这种现象导致 IMC 层厚度增加,同时焊点内 IMC 层的体积也成比例增加。IMC 的脆性使其容易在小尺寸焊点中过度生长,这有可能对焊接接头的可靠性产生负面影响。因此,调节 IMC 的形成和生长至关重要。下文介绍了在铜基底上电沉积 Ni-W 层,形成阻挡层的过程。随后,对锡/铜反应偶之间的阻挡特性进行了全面系统的研究。研究表明,Ni-W 层具有阻碍锡原子向铜扩散的能力。此外,Ni-W 层还是锡/铜界面上一个可行的扩散屏障。在焊接回流过程中,所有 Ni-W 涂层中都能观察到 "光亮层 "Ni2WSn4,而且它的生长几乎是线性的。Ni-W 层的结构降低了其固有的阻隔性能。这是由于 "光亮层 "Ni2WSn4 覆盖了原来的 Ni-W 阻挡层。在 300 °C 的温度下持续 600 秒,Ni-W 阻挡层就会失去阻挡功能。一旦 "光亮层 "Ni2WSn4 完全覆盖了原来的 Ni-W 阻挡层,锡扩散到铜基板侧的扩散活化能就会显著降低,特别是在由于电镀张力而导致变形能量集中的区域。光亮层 "Ni2WSn4 和锡都会迅速生长,并形成铜锡金属间化合物(IMC)。在 250 °C 的温度下,Ni3Sn4 金属际化合物的生长受晶界控制。相反,Ni2WSn4 层(Ni-W 层的消耗)的生长则受到晶界扩散和块体扩散的共同影响。在 275 °C 和 300 °C 的温度下,Ni3Sn4 基 IMC 和 Ni2WSn4 层(Ni-W 层的消耗)的生长均受晶界控制。这项研究的结果可为带有阻挡层的焊点的理论设计以及在不同焊接工艺中使用的 Ni-W 扩散阻挡层的选择提供参考。这反过来又能提高微电子器件的可靠性,具有重要的理论和实用价值。
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Diffusion Barrier Performance of Ni-W Layer at Sn/Cu Interfacial Reaction
As the integration of chips in 3D integrated circuits (ICs) increases and the size of micro-bumps reduces, issues with the reliability of service due to electromigration and thermomigration are becoming more prevalent. In the practical application of solder joints, an increase in the grain size of intermetallic compounds (IMCs) has been observed during the reflow process. This phenomenon results in an increased thickness of the IMC layer, accompanied by a proportional increase in the volume of the IMC layer within the joint. The brittle nature of IMC renders it susceptible to excessive growth in small-sized joints, which has the potential to negatively impact the reliability of the welded joint. It is therefore of the utmost importance to regulate the formation and growth of IMCs. The following paper presents the electrodeposition of a Ni-W layer on a Cu substrate, forming a barrier layer. Subsequently, the barrier properties between the Sn/Cu reactive couples were subjected to a comprehensive and systematic investigation. The study indicates that the Ni-W layer has the capacity to impede the diffusion of Sn atoms into Cu. Furthermore, the Ni-W layer is a viable diffusion barrier at the Sn/Cu interface. The “bright layer” Ni2WSn4 can be observed in all Ni-W coatings during the soldering reflow process, and its growth was almost linear. The structure of the Ni-W layer is such that it reduces the barrier properties that would otherwise be inherent to it. This is due to the “bright layer” Ni2WSn4 that covers the original Ni-W barrier layer. At a temperature of 300 °C for a duration of 600 s, the Ni-W barrier layer loses its blocking function. Once the “bright layer” Ni2WSn4 has completely covered the original Ni-W barrier layer, the diffusion activation energy for Sn diffusion into the Cu substrate side will be significantly reduced, particularly in areas where the distortion energy is concentrated due to electroplating tension. Both the “bright layer” Ni2WSn4 and Sn will grow rapidly, with the formation of Cu-Sn intermetallic compounds (IMCs). At temperatures of 250 °C, the growth of Ni3Sn4-based IMCs is controlled by grain boundaries. Conversely, the growth of the Ni2WSn4 layer (consumption of Ni-W layer) is influenced by a combination of grain boundary diffusion and bulk diffusion. At temperatures of 275 °C and 300 °C, the growth of Ni3Sn4-based IMCs and the Ni2WSn4 layer (consumption of Ni-W layer) are both controlled by grain boundaries. The findings of this study can inform the theoretical design of solder joints with barrier layers as well as the selection of Ni-W diffusion barrier layers for use in different soldering processes. This can, in turn, enhance the reliability of microelectronic devices, offering significant theoretical and practical value.
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