用于 2.5 维封装的金刚石贴片的散热和电气特性研究

IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Transactions on Components, Packaging and Manufacturing Technology Pub Date : 2024-07-30 DOI:10.1109/TCPMT.2024.3435835
Hutao Shi;Chunmin Cheng;Chao Sun;Zhenyang Lei;Gai Wu;Lijie Li;Kang Liang;Wei Shen;Sheng Liu
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引用次数: 0

摘要

在 2.5-D 封装中,热聚集和信号串扰一直是高密度互连技术发展的主要障碍,极大地影响了设备的可靠性。本研究提出了一种具有优异导热性和低介电常数的多晶/单晶金刚石插层,作为硅插层的替代品,旨在同时解决热和电气问题。通过分析传热、散热和电气特性,研究了硅、玻璃和金刚石插层的热特性和电气特性。结果表明,金刚石插层有望有效改善传热效果,金刚石通孔(TDV)电池的等效热导率始终大于 1200 W/m $\cdot $ K。与硅相比,多晶金刚石插层的整体热阻和峰值温度分别下降了 0.75~^{\circ }$ C/W 和 23.9~^{\circ }$ C。金刚石插层温度均匀性的改善有助于降低芯片机械故障和延迟的风险。此外,TDV 单元的峰值传输系数为 -0.24 dB,与硅通孔(TSV)相比,回波损耗更低。金刚石插层为 2.5-D 封装中的热管理和信号串扰提供了有效的解决方案,使其成为高可靠性封装领域的一个有前途的候选产品。
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Investigation of Heat Dissipation and Electrical Properties of Diamond Interposer for 2.5-D Packagings
In 2.5-D packaging, thermal aggregation and signal crosstalk have been major obstacles in the development of high-density interconnect technology, greatly impacting the reliability of devices. This work presents a polycrystal/monocrystal diamond interposer with excellent thermal conductivity and low dielectric constant as a substitute for the Si interposer, aiming to address both thermal and electrical issues simultaneously. The thermal and electrical characteristics of Si, glass, and diamond interposers are investigated by analyzing heat transfer, heat dissipation, and electrical characteristics. The results show that diamond interposers are expected to effectively improve the heat transfer effect with the equivalent thermal conductivity of through-diamond via (TDV) cell always greater than 1200 W/m $\cdot $ K. The overall thermal resistance and peak temperature of the polycrystal diamond interposer drop by $0.75~^{\circ }$ C/W and $23.9~^{\circ }$ C compared to Si, respectively. The improved temperature uniformity of diamond interposer helps to reduce the risk of mechanical failure and delay of the chip. Furthermore, the peak transmission coefficient in TDV cell is -0.24 dB, which experienced a lower return loss compared to through-silicon via (TSV). Diamond interposers provide effective solutions for thermal management and signal crosstalk in 2.5-D packages, making it a promising candidate in the field of highly reliable packaging.
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来源期刊
IEEE Transactions on Components, Packaging and Manufacturing Technology
IEEE Transactions on Components, Packaging and Manufacturing Technology ENGINEERING, MANUFACTURING-ENGINEERING, ELECTRICAL & ELECTRONIC
CiteScore
4.70
自引率
13.60%
发文量
203
审稿时长
3 months
期刊介绍: IEEE Transactions on Components, Packaging, and Manufacturing Technology publishes research and application articles on modeling, design, building blocks, technical infrastructure, and analysis underpinning electronic, photonic and MEMS packaging, in addition to new developments in passive components, electrical contacts and connectors, thermal management, and device reliability; as well as the manufacture of electronics parts and assemblies, with broad coverage of design, factory modeling, assembly methods, quality, product robustness, and design-for-environment.
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