利用 MOCVD 技术生长的高性能甚长波红外量子级联探测器

IF 2.2 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Journal of Quantum Electronics Pub Date : 2024-08-22 DOI:10.1109/JQE.2024.3448399

Kai Guo;Yixuan Zhu;Yu Chen;Kun Li;Shenqiang Zhai;Shuman Liu;Ning Zhuo;Jinchuan Zhang;Lijun Wang;Fengqi Liu;Xiaohua Wang;Zhipeng Wei;Junqi Liu

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引用次数: 0

摘要

我们介绍了一种针对金属有机化学气相沉积（MOCVD）萃取区进行优化的甚长波红外量子级联探测器（QCD）。高能态的波函数被调整为漏斗状的迷你带结构。这种设计加速了电子的萃取和收集，从而提高了器件的萃取效率，理论计算值为 91%。此外，这种迷你带萃取方案还增加了基态与纵向光学（LO）声子阶跃电平之间的井势垒对数量。热回填和热激活泄漏引起的电子损耗可以有效减少。对于一个来自4英寸晶圆的200~\mu $ m的200~\mu $ m的mesa器件，在30 K时获得了66 mA/W的峰值响应率和1.4 \times 10^{11}$ Jones的峰值比检测率，最高工作温度可持续到170 K。

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High-Performance Very Long Wave Infrared Quantum Cascade Detector Grown by MOCVD

We present a very long wave infrared (VLWIR) quantum cascade detector (QCD) optimized for the extraction region grown by metal organic chemical vapor deposition (MOCVD). The wave function of high-energy states has been tailored into a funnel-shaped miniband structure. This design accelerates the extraction and collection of electrons, thereby enhancing the device’s extraction efficiency, with a theoretical calculation value of 91%. Besides, this miniband extraction scheme also increases the number of well barrier pairs between the ground state and the longitudinal optical (LO) phonon step level. The electron loss caused by thermal backfilling and thermally activated leakage can be effectively reduced. For a

$200~\mu $

$\times 200~\mu $

m mesa device from a 4-inch wafer, a peak responsivity of 66 mA/W and a peak specific detectivity of

$1.4 \times 10^{11}$

Jones were obtained at 30 K, with the maximum operating temperature persists up to 170 K.

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来源期刊

IEEE Journal of Quantum Electronics 工程技术-工程：电子与电气

CiteScore

4.70

自引率

4.00%

发文量

审稿时长

3.0 months

期刊介绍： The IEEE Journal of Quantum Electronics is dedicated to the publication of manuscripts reporting novel experimental or theoretical results in the broad field of the science and technology of quantum electronics. The Journal comprises original contributions, both regular papers and letters, describing significant advances in the understanding of quantum electronics phenomena or the demonstration of new devices, systems, or applications. Manuscripts reporting new developments in systems and applications must emphasize quantum electronics principles or devices. The scope of JQE encompasses the generation, propagation, detection, and application of coherent electromagnetic radiation having wavelengths below one millimeter (i.e., in the submillimeter, infrared, visible, ultraviolet, etc., regions). Whether the focus of a manuscript is a quantum-electronic device or phenomenon, the critical factor in the editorial review of a manuscript is the potential impact of the results presented on continuing research in the field or on advancing the technological base of quantum electronics.