第 12 章:集成电路和微型模块的微组装

V. L. Lanin, V. A. Emel’yanov, I. B. Petuhov
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摘要

摘要线键合由于其工艺自动化程度高、制造技术选择多样以及产品的几何尺寸,仍然是组装集成电路和微型模块的主要方法。集成电子设备互连方法的开发取得了重大进展,减轻了这些操作的复杂性,并在实现完全自动化方面取得了显著成就。对集成电路和微模块组装过程中的各种工艺,如热压键合、超声波(US)键合和热超声波键合进行了广泛的研究。书中还介绍了键合自动化设备的特点以及所使用工具的特殊性,以便读者全面了解。在超声波键合中,超声波频率的机械振动被引入接触区,导致导线引线的塑性变形和氧化膜的去除,从而形成原子洁净的幼体表面。在键合形成过程中,这一过程可强化活性中心的形成,而不会导致线材明显变形或大量加热。热超声键合涉及超声波能量、工具加载力和高达 200-220°C 的加热温度的综合作用。这种组合提高了接合质量的可重复性,消除了对接合材料特性变化的敏感性,从而获得更一致、更可靠的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Chapter 12: Microassembly of Integrated Circuits and Micromodules

Wire bonding remains a primary method for assembling integrated circuits and micromodules due to its high process automation and versatility across manufacturing technological options, as well as the geometric dimensions of the products. Significant progress has been made in the development of interconnection methods in integrated electronic devices, mitigating the complexity of these operations and notable successes towards their full automation. Various processes such as thermocompression bonding, ultrasonic (US) bonding, and thermo-ultrasonic bonding during the assembly of integrated circuits and micromodules are extensively examined. The characteristics of automatic equipment for bonding, along with the peculiarities of the tools employed, are provided for comprehensive understanding. In ultrasonic bonding, mechanical vibrations of ultrasonic frequency are introduced into the contact zone, resulting in the plastic deformation of the wire lead and the removal of oxide films, thereby creating atomically clean juvenile surfaces. This process intensifies the formation of active centers during the bond formation without significant wire deformation or substantial heating. Thermo-ultrasonic bonding involves the combined action of ultrasonic energy, tool loading force, and heating temperature up to 200–220°C. This combination enhances the reproducibility of bond quality and eliminates sensitivity to variations in the properties of the materials being bonded, leading to more consistent and reliable results.

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来源期刊
Surface Engineering and Applied Electrochemistry
Surface Engineering and Applied Electrochemistry Engineering-Industrial and Manufacturing Engineering
CiteScore
1.60
自引率
22.20%
发文量
54
期刊介绍: Surface Engineering and Applied Electrochemistry is a journal that publishes original and review articles on theory and applications of electroerosion and electrochemical methods for the treatment of materials; physical and chemical methods for the preparation of macro-, micro-, and nanomaterials and their properties; electrical processes in engineering, chemistry, and methods for the processing of biological products and food; and application electromagnetic fields in biological systems.
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