Meiyu Wang;Peng Gao;Fangmin Shi;Weibo Hu;Xudong Wang;Haidong Yan;Yunhui Mei
{"title":"用于大功率和高频应用的 GaN HEMT 模块的先进封装技术:综述","authors":"Meiyu Wang;Peng Gao;Fangmin Shi;Weibo Hu;Xudong Wang;Haidong Yan;Yunhui Mei","doi":"10.1109/TCPMT.2024.3447079","DOIUrl":null,"url":null,"abstract":"The gallium-nitride (GaN) high-electron-mobility transistors (HEMT) devices have great potential for high-power, high-temperature, and high-frequency applications. However, it is challenging to package GaN HEMT power module with both low parasitic inductance and thermal resistance because the lateral GaN HEMT devices have fast switching speed, high heat flux density, and small die size. This article made a comprehensive review on the state-of-the-art packaging technologies of GaN HEMT power modules based on different substrate integration structures, including printed circuit board (PCB) surface mounting, wire-bonded flip chip, PCB-embedded, ceramic-substrate integrated, insulated metal substrate (IMS) integrated, and hybrid PCB-on-direct bond copper (DBC) packaging. Each technology has a tradeoff among parasitic inductance, thermal performance, and manufacturability. Innovations are still necessary for packaging GaN HEMT modules for their applications in high-frequency and high-power-density converters.","PeriodicalId":13085,"journal":{"name":"IEEE Transactions on Components, Packaging and Manufacturing Technology","volume":"14 9","pages":"1537-1550"},"PeriodicalIF":2.3000,"publicationDate":"2024-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Advanced Packaging Technology of GaN HEMT Module for High-Power and High-Frequency Applications: A Review\",\"authors\":\"Meiyu Wang;Peng Gao;Fangmin Shi;Weibo Hu;Xudong Wang;Haidong Yan;Yunhui Mei\",\"doi\":\"10.1109/TCPMT.2024.3447079\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The gallium-nitride (GaN) high-electron-mobility transistors (HEMT) devices have great potential for high-power, high-temperature, and high-frequency applications. However, it is challenging to package GaN HEMT power module with both low parasitic inductance and thermal resistance because the lateral GaN HEMT devices have fast switching speed, high heat flux density, and small die size. This article made a comprehensive review on the state-of-the-art packaging technologies of GaN HEMT power modules based on different substrate integration structures, including printed circuit board (PCB) surface mounting, wire-bonded flip chip, PCB-embedded, ceramic-substrate integrated, insulated metal substrate (IMS) integrated, and hybrid PCB-on-direct bond copper (DBC) packaging. Each technology has a tradeoff among parasitic inductance, thermal performance, and manufacturability. Innovations are still necessary for packaging GaN HEMT modules for their applications in high-frequency and high-power-density converters.\",\"PeriodicalId\":13085,\"journal\":{\"name\":\"IEEE Transactions on Components, Packaging and Manufacturing Technology\",\"volume\":\"14 9\",\"pages\":\"1537-1550\"},\"PeriodicalIF\":2.3000,\"publicationDate\":\"2024-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Components, Packaging and Manufacturing Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10643466/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Components, Packaging and Manufacturing Technology","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10643466/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
氮化镓(GaN)高电子迁移率晶体管(HEMT)器件在大功率、高温和高频应用方面具有巨大潜力。然而,由于侧向 GaN HEMT 器件具有开关速度快、热通量密度高和芯片尺寸小等特点,因此封装具有低寄生电感和热阻的 GaN HEMT 功率模块是一项挑战。本文全面综述了基于不同基板集成结构的 GaN HEMT 功率模块的最新封装技术,包括印刷电路板(PCB)表面贴装、线键合倒装芯片、PCB 嵌入、陶瓷基板集成、绝缘金属基板(IMS)集成以及 PCB 直接键合铜(DBC)混合封装。每种技术都需要在寄生电感、热性能和可制造性之间进行权衡。为了将 GaN HEMT 模块应用于高频和高功率密度转换器,封装技术仍需创新。
Advanced Packaging Technology of GaN HEMT Module for High-Power and High-Frequency Applications: A Review
The gallium-nitride (GaN) high-electron-mobility transistors (HEMT) devices have great potential for high-power, high-temperature, and high-frequency applications. However, it is challenging to package GaN HEMT power module with both low parasitic inductance and thermal resistance because the lateral GaN HEMT devices have fast switching speed, high heat flux density, and small die size. This article made a comprehensive review on the state-of-the-art packaging technologies of GaN HEMT power modules based on different substrate integration structures, including printed circuit board (PCB) surface mounting, wire-bonded flip chip, PCB-embedded, ceramic-substrate integrated, insulated metal substrate (IMS) integrated, and hybrid PCB-on-direct bond copper (DBC) packaging. Each technology has a tradeoff among parasitic inductance, thermal performance, and manufacturability. Innovations are still necessary for packaging GaN HEMT modules for their applications in high-frequency and high-power-density converters.
期刊介绍:
IEEE Transactions on Components, Packaging, and Manufacturing Technology publishes research and application articles on modeling, design, building blocks, technical infrastructure, and analysis underpinning electronic, photonic and MEMS packaging, in addition to new developments in passive components, electrical contacts and connectors, thermal management, and device reliability; as well as the manufacture of electronics parts and assemblies, with broad coverage of design, factory modeling, assembly methods, quality, product robustness, and design-for-environment.