Chunmin Cheng, Xiang Sun, Wei Shen, Qijun Wang, Lijie Li, Fang Dong, Kang Liang, Gai Wu
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引用次数: 0
摘要
由于难以进行 n 型掺杂,在电子设备中利用金刚石这种终极半导体具有挑战性。磷(P)掺杂金刚石是最常见的 n 型金刚石,但仍受限于 P 掺杂剂的低溶解度以及空位缺陷和氢结合等不良补偿缺陷。为了克服这一局限性,本研究从理论上将应变工程引入 n 型 P 掺杂金刚石。对掺杂 P 的金刚石施加了单轴、等轴和静压三轴应变。然后根据第一性原理计算了掺 P 金刚石的形成能、电荷转移水平、缺陷结合能和其他物理性质。结果表明,单轴、等轴和静压三轴拉伸应变能降低掺杂 P 的形成能和供体电离能,也能降低磷-空位(PV)和磷-氢(PH)缺陷的结合能。我们的研究结果表明,在拉伸应变条件下,掺杂 P 的金刚石的 P 溶解度和 n 型电导率可以提高,补偿缺陷的形成也会受到抑制。因此,应变工程有望用于增强掺杂 P 的金刚石的 n 型特性,从而促进其在电子设备中的应用。
Enhancing n-type doping in diamond by strain engineering
The utilization of diamond, the ultimate semiconductor, in electronic devices is challenging due to the difficulty of n-type doping. Phosphorus (P)-doped diamond, the most prevalent type of n-type diamond, is still limited by the low solubility of P dopant and undesirable compensating defects such as vacancy defects and hydrogen incorporation. In order to overcome this limitation, strain engineering is introduced to the n-type P-doped diamond theoretically in this work. Uniaxial, equibiaxial, and hydrostatic triaxial strains are applied to the P-doped diamond. The formation energy, charge transition level, defect binding energy and other physical properties of the P-doped diamond are then calculated based on first-principles calculations. The results show that uniaxial, equibiaxial, and hydrostatic triaxial tensile strain can reduce the formation energy and the donor ionization energy of P dopant, and also reduce the binding energy of phosphorus–vacancy (PV) and phosphorus–hydrogen (PH) defects. Our results indicate that under tensile strain, the solubility of the P dopant and the n-type conductivity of the P-doped diamond can be increased, and the formation of compensating defects can be suppressed. Therefore, strain engineering is anticipated to be used to enhance the n-type characteristics of the P-doped diamond, facilitating its application in electronic devices.
期刊介绍:
This journal is concerned with all aspects of applied physics research, from biophysics, magnetism, plasmas and semiconductors to the structure and properties of matter.