{"title":"气体加热在电容耦合射频等离子体辅助合成碳纳米材料中的重要性","authors":"Tanvi Nikhar, Sankhadeep Basu, Shota Abe, Shurik Yatom, Yevgeny Raitses, Rebecca Anthony, Sergey V Baryshev","doi":"10.1088/1361-6463/ad6d78","DOIUrl":null,"url":null,"abstract":"In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency flow-through plasma reactor was operated with methane-argon gas mixtures. Signatures of the final product obtained microscopically and spectroscopically indicated that the product was an amorphous form of graphite. This result was consistent irrespective of combinations of the macroscopic reactor settings. To explain the observed synthesis output, measurements of C<sub>2</sub> and gas properties were carried out by laser-induced fluorescence and optical emission spectroscopy. Strikingly, the results indicated a strong gas temperature gradient of 100 K per mm from the center of the reactor to the wall. Based on additional plasma imaging, a model of hot constricted region (filamentation region) was then formulated. It illustrated that, while the hot constricted region was present, the bulk of the gas was not hot enough to facilitate diamond <italic toggle=\"yes\">sp</italic><sup>3</sup> formation: characterized by much lower reaction rates, when compared to <italic toggle=\"yes\">sp</italic><sup>2</sup>, <italic toggle=\"yes\">sp</italic><sup>3</sup> formation kinetics are expected to become exponentially slow. This result was further confirmed by experiments under identical conditions but with a H<sub>2</sub>/CH<sub>4</sub> mixture, where no output material was detected: if graphitic <italic toggle=\"yes\">sp</italic><sup>2</sup> formation was expected as the main output material from the methane feedstock, atomic hydrogen would then be expected to etch it away <italic toggle=\"yes\">in situ</italic>, such that the net production of that <italic toggle=\"yes\">sp</italic><sup>2</sup>-hybridized solid material is nearly a zero. Finally, the crucial importance of gas heating was corroborated by replacing RF with microwave source whereby facile <italic toggle=\"yes\">sp</italic><sup>3</sup> production was attained with H<sub>2</sub>/CH<sub>4</sub> gas mixture.","PeriodicalId":16789,"journal":{"name":"Journal of Physics D: Applied Physics","volume":"7 1","pages":""},"PeriodicalIF":3.1000,"publicationDate":"2024-08-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Importance of gas heating in capacitively coupled radiofrequency plasma-assisted synthesis of carbon nanomaterials\",\"authors\":\"Tanvi Nikhar, Sankhadeep Basu, Shota Abe, Shurik Yatom, Yevgeny Raitses, Rebecca Anthony, Sergey V Baryshev\",\"doi\":\"10.1088/1361-6463/ad6d78\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency flow-through plasma reactor was operated with methane-argon gas mixtures. Signatures of the final product obtained microscopically and spectroscopically indicated that the product was an amorphous form of graphite. This result was consistent irrespective of combinations of the macroscopic reactor settings. To explain the observed synthesis output, measurements of C<sub>2</sub> and gas properties were carried out by laser-induced fluorescence and optical emission spectroscopy. Strikingly, the results indicated a strong gas temperature gradient of 100 K per mm from the center of the reactor to the wall. Based on additional plasma imaging, a model of hot constricted region (filamentation region) was then formulated. It illustrated that, while the hot constricted region was present, the bulk of the gas was not hot enough to facilitate diamond <italic toggle=\\\"yes\\\">sp</italic><sup>3</sup> formation: characterized by much lower reaction rates, when compared to <italic toggle=\\\"yes\\\">sp</italic><sup>2</sup>, <italic toggle=\\\"yes\\\">sp</italic><sup>3</sup> formation kinetics are expected to become exponentially slow. This result was further confirmed by experiments under identical conditions but with a H<sub>2</sub>/CH<sub>4</sub> mixture, where no output material was detected: if graphitic <italic toggle=\\\"yes\\\">sp</italic><sup>2</sup> formation was expected as the main output material from the methane feedstock, atomic hydrogen would then be expected to etch it away <italic toggle=\\\"yes\\\">in situ</italic>, such that the net production of that <italic toggle=\\\"yes\\\">sp</italic><sup>2</sup>-hybridized solid material is nearly a zero. Finally, the crucial importance of gas heating was corroborated by replacing RF with microwave source whereby facile <italic toggle=\\\"yes\\\">sp</italic><sup>3</sup> production was attained with H<sub>2</sub>/CH<sub>4</sub> gas mixture.\",\"PeriodicalId\":16789,\"journal\":{\"name\":\"Journal of Physics D: Applied Physics\",\"volume\":\"7 1\",\"pages\":\"\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2024-08-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Physics D: Applied Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6463/ad6d78\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Physics D: Applied Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1088/1361-6463/ad6d78","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
Importance of gas heating in capacitively coupled radiofrequency plasma-assisted synthesis of carbon nanomaterials
In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency flow-through plasma reactor was operated with methane-argon gas mixtures. Signatures of the final product obtained microscopically and spectroscopically indicated that the product was an amorphous form of graphite. This result was consistent irrespective of combinations of the macroscopic reactor settings. To explain the observed synthesis output, measurements of C2 and gas properties were carried out by laser-induced fluorescence and optical emission spectroscopy. Strikingly, the results indicated a strong gas temperature gradient of 100 K per mm from the center of the reactor to the wall. Based on additional plasma imaging, a model of hot constricted region (filamentation region) was then formulated. It illustrated that, while the hot constricted region was present, the bulk of the gas was not hot enough to facilitate diamond sp3 formation: characterized by much lower reaction rates, when compared to sp2, sp3 formation kinetics are expected to become exponentially slow. This result was further confirmed by experiments under identical conditions but with a H2/CH4 mixture, where no output material was detected: if graphitic sp2 formation was expected as the main output material from the methane feedstock, atomic hydrogen would then be expected to etch it away in situ, such that the net production of that sp2-hybridized solid material is nearly a zero. Finally, the crucial importance of gas heating was corroborated by replacing RF with microwave source whereby facile sp3 production was attained with H2/CH4 gas mixture.
期刊介绍:
This journal is concerned with all aspects of applied physics research, from biophysics, magnetism, plasmas and semiconductors to the structure and properties of matter.