{"title":"脉冲频率对 HiPIMS 沉积的 Ti-Al-Ta-N 涂层的结构、机械和摩擦学特性的影响","authors":"","doi":"10.1016/j.vacuum.2024.113636","DOIUrl":null,"url":null,"abstract":"<div><p>Columnar microstructure significantly deteriorates performance of Ti-Al-Ta-N coatings obtained by physical vapor deposition. The present work is focused on studying the possibility to hinder the growth of columnar grains in the Ti-Al-Ta-N coatings using short-pulse high-power impulse magnetron sputtering (HiPIMS). The change of the pulse length is carried out by varying the pulse frequency <em>f</em> from 0.5 to 10 kHz at a constant duty cycle of 10 %. This results in decreasing the pulse length from 200 to 10 μs. It is found that the pulse frequency affects the parameters of magnetron discharge and ion flux at the substrate. Short-pulse HiPIMS realized at higher pulse frequencies (2–10 kHz) provides an increase in the ion flux arriving at the substrate compared to the HiPIMS processes at lower frequencies (0.5 and 1 kHz). The increased ion flux bombarding the growing coatings leads to evolution of their microstructure from the open columnar structure observed at <em>f</em> < 2 kHz to the dense microstructure containing only small columnar fragments at <em>f</em> ≥ 2 kHz. The microstructure modification provides improved mechanical properties and wear resistance of the Ti-Al-Ta-N coatings obtained at <em>f</em> ≥ 2 kHz. The maximum hardness and wear resistance were found in the coating deposited at 5 kHz.</p></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":null,"pages":null},"PeriodicalIF":3.8000,"publicationDate":"2024-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of the pulse frequency on the structure, mechanical and tribological properties of Ti-Al-Ta-N coatings deposited by HiPIMS\",\"authors\":\"\",\"doi\":\"10.1016/j.vacuum.2024.113636\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Columnar microstructure significantly deteriorates performance of Ti-Al-Ta-N coatings obtained by physical vapor deposition. The present work is focused on studying the possibility to hinder the growth of columnar grains in the Ti-Al-Ta-N coatings using short-pulse high-power impulse magnetron sputtering (HiPIMS). The change of the pulse length is carried out by varying the pulse frequency <em>f</em> from 0.5 to 10 kHz at a constant duty cycle of 10 %. This results in decreasing the pulse length from 200 to 10 μs. It is found that the pulse frequency affects the parameters of magnetron discharge and ion flux at the substrate. Short-pulse HiPIMS realized at higher pulse frequencies (2–10 kHz) provides an increase in the ion flux arriving at the substrate compared to the HiPIMS processes at lower frequencies (0.5 and 1 kHz). The increased ion flux bombarding the growing coatings leads to evolution of their microstructure from the open columnar structure observed at <em>f</em> < 2 kHz to the dense microstructure containing only small columnar fragments at <em>f</em> ≥ 2 kHz. The microstructure modification provides improved mechanical properties and wear resistance of the Ti-Al-Ta-N coatings obtained at <em>f</em> ≥ 2 kHz. The maximum hardness and wear resistance were found in the coating deposited at 5 kHz.</p></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2024-09-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X24006821\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X24006821","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Effect of the pulse frequency on the structure, mechanical and tribological properties of Ti-Al-Ta-N coatings deposited by HiPIMS
Columnar microstructure significantly deteriorates performance of Ti-Al-Ta-N coatings obtained by physical vapor deposition. The present work is focused on studying the possibility to hinder the growth of columnar grains in the Ti-Al-Ta-N coatings using short-pulse high-power impulse magnetron sputtering (HiPIMS). The change of the pulse length is carried out by varying the pulse frequency f from 0.5 to 10 kHz at a constant duty cycle of 10 %. This results in decreasing the pulse length from 200 to 10 μs. It is found that the pulse frequency affects the parameters of magnetron discharge and ion flux at the substrate. Short-pulse HiPIMS realized at higher pulse frequencies (2–10 kHz) provides an increase in the ion flux arriving at the substrate compared to the HiPIMS processes at lower frequencies (0.5 and 1 kHz). The increased ion flux bombarding the growing coatings leads to evolution of their microstructure from the open columnar structure observed at f < 2 kHz to the dense microstructure containing only small columnar fragments at f ≥ 2 kHz. The microstructure modification provides improved mechanical properties and wear resistance of the Ti-Al-Ta-N coatings obtained at f ≥ 2 kHz. The maximum hardness and wear resistance were found in the coating deposited at 5 kHz.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.