利用飞秒激光微处理技术实现的带级联蝶形多模干涉耦合器的三重器芯片

IF 4.6 2区物理与天体物理 Q1 OPTICS Optics and Laser Technology Pub Date : 2024-09-17 DOI:10.1016/j.optlastec.2024.111753

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引用次数: 0

摘要

本文提出了一种三路光耦合器芯片，利用三个级联蝶形多模干涉（MMI）耦合器从各自端口输出三路光信号。该芯片由硼硅玻璃基板、JA 光刻胶核心层和 RZJ 光刻胶包层组成。芯片的设计和优化采用了光束传播法（BPM）。对飞秒激光加工进行了研究，芯片的加工激光功率为 1.6 mW，烧蚀速度为 4 mm/s。测试表明，该芯片符合设计规范，插入损耗低至 4.34 dB，消光比大于 15 dB，串扰小于 -15 dB，带宽达 3 dB，最高可达 76.8 nm。

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A triplexer chip with cascaded butterfly multimode interference couplers by femtosecond laser microprocessing

A triplexer chip utilizing three cascaded butterfly multimode interference (MMI) couplers to output three optical signals from their respective ports is proposed. The chip consists of a borosilicate glass substrate, a JA photoresist core layer, and an RZJ photoresist cladding. The beam propagation method (BPM) is used to design and optimize the chip. The femtosecond laser processing is investigated, and the chip is processed with a laser power of 1.6 mW and an ablation speed of 4 mm/s. Tests show that the chip meets the design specifications with a low insertion loss of 4.34 dB, an extinction ratio of more than 15 dB, a crosstalk of less than −15 dB, and a 3 dB bandwidth up to 76.8 nm.

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems