超晶格 Si/SiO2 中的极性光学声子

IF 0.6 4区物理与天体物理 Q4 PHYSICS, CONDENSED MATTER Semiconductors Pub Date : 2024-09-17 DOI:10.1134/s1063782624050142

M. B. Smirnov, N. R. Grigorieva, D. V. Pankin, E. M. Roginskii, A. V. Savin

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引用次数: 0

摘要

摘要对在现代电子学中发挥重要作用的平面 Si/SiO2 异质结构的介电性能进行了研究。利用介电连续体模型，研究了 Si/SiO2 二元超晶格中的极性声子光谱。石英和钙钛矿晶格被视为氧化物层的结构模型。获得了极性光学声子频率和高频介电常数张量元素对层厚度比的依赖关系。这些结果为利用光谱数据描述超晶格结构提供了可能。

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Polar Optical Phonons in Superlattices Si/SiO2

Abstract

A study was carried out of the dielectric properties of planar Si/SiO₂ heterostructures, which play an important role in modern electronics. Using the model of dielectric continuum, the spectra of polar phonons in Si/SiO₂ binary superlattices have been studied. Quartz and cristobalite lattices are considered as a structural model of the oxide layer. The dependences of polar optical phonons frequencies and the high-frequency dielectric constant tensor elements on the ratio of layer thicknesses were obtained. The results obtained open up the possibility of using spectroscopic data to characterize the structure of superlattices.

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来源期刊

Semiconductors 物理-物理：凝聚态物理

CiteScore

1.50

自引率

28.60%

发文量

131

审稿时长

3-6 weeks

期刊介绍： Publishes the most important work in semiconductor research in the countries of the former Soviet Union. Covers semiconductor theory, transport phenomena in semiconductors, optics, magnetooptics, and electrooptics of semiconductors, semiconductor lasers and semiconductor surface physics. The journal features an extensive book review section.