基于能带结构的高效计算方法,用于准确确定UTB MOSFET 的静电和源极至漏极隧道电流

IF 4.6 Q2 MATERIALS SCIENCE, BIOMATERIALS ACS Applied Bio Materials Pub Date : 2024-09-27 DOI:10.1109/JEDS.2024.3469398
Nalin Vilochan Mishra;Aditya Sankar Medury
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引用次数: 0

摘要

只有准确考虑量子约束效应 (QCE) 和短沟道效应 (SCE) 等关键物理效应,才能真实评估超薄体 (UTB) MOS 器件实现沟道长度扩展的能力。只有通过基于全带结构的方法才能准确地考虑 QCE,而这种方法往往计算效率低下,尤其是在沟道厚度较高的情况下,当需要用于计算 2-D 沟道静电时,计算效率会进一步降低。因此,在这项工作中,我们提出了一种方法,通过使用 $sp^{3}d^{5}s^{*}$ 半经验紧约束方法,仅在可能对静电产生重大影响的 k 点上求解 1-D 带结构与 2-D 泊松方程自洽,从而高效地模拟 UTB 双栅极 MOSFET 的沟道静电。通过证明确定源-沟道交界处的一维带状结构足以精确确定二维沟道静电,我们表明即使在更高的沟道长度上,这种方法仍然具有可计算性。通过采用这种方法,我们获得了电子密度和沟道电势等重要器件参数的二维剖面图,进而可以使用 Tsu-Esaki 和 WKB 形式分别确定宽器件参数范围内的热离子电流密度和源漏隧穿电流密度。此外,在计算漏极电流时还纳入了声子散射效应,这种效应可能会在较长的沟道长度上表现出来,从而使这种方法具有广泛的适用性。
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Computationally Efficient Band Structure-Based Approach for Accurately Determining Electrostatics and Source-to-Drain Tunneling Current in UTB MOSFETs
The ability of Ultra-Thin-Body (UTB) MOS devices to enable channel length scaling can only be realistically assessed by accurately taking key physical effects such as Quantum Confinement effects (QCEs) and Short channel effects (SCEs) into account. QCEs can accurately be considered only through a full band structure-based approach, which tends to be computationally inefficient, particularly at higher channel thicknesses, and is further exacerbated when required to be used to calculate 2-D channel electrostatics. Therefore, in this work, we propose a methodology to efficiently simulate the channel electrostatics of a UTB Double Gate MOSFET by solving the 1-D band structure with the 2-D Poisson’s equation self consistently, determined by using the $sp^{3}d^{5}s^{*}$ semi-empirical tight-binding approach only over those k-points that are likely to have a significant effect on the electrostatics. By showing that determining the 1-D Band structure at the source-channel junction is adequate to accurately determine the 2-D channel electrostatics, we show that this approach remains computationally tractable even at higher channel lengths. By following this approach, we obtain the 2-D profile of important device parameters such as electron density and channel potential, which, in turn, enables the determination of the thermionic current density and source-to-drain tunneling current density for a wide range of device parameters using Tsu-Esaki and WKB formalism respectively. Furthermore, the effect of phonon scattering, which is likely to manifest at longer channel lengths, is also incorporated in the drain current calculation, thus making this approach widely applicable.
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来源期刊
ACS Applied Bio Materials
ACS Applied Bio Materials Chemistry-Chemistry (all)
CiteScore
9.40
自引率
2.10%
发文量
464
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