{"title":"基于参考光调制的波前传感和光学表面测量方法","authors":"Xie Li, Junkang Guo, Kunpeng Liu, Zhigang Liu","doi":"10.1016/j.optlaseng.2024.108659","DOIUrl":null,"url":null,"abstract":"<div><div>This paper proposes a reflection-type surface coherent interferometric modulation imaging (R-CIMI) method based on reference light modulation, leveraging the interference light path generated by the reflected beam of the modulator and the target surface. Furthermore, we present a mask optimization strategy to enhance the similarity of diffraction pattern structures, as well as an automatic positioning approach based on optical field estimation. Owing to the anti-disturbance properties of coherent diffraction imaging, R-CIMI is less susceptible to environmental disturbances than conventional interference techniques. Simulations and experiments demonstrate that the proposed method is comparable to conventional interference methods in terms of measurement accuracy.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108659"},"PeriodicalIF":3.5000,"publicationDate":"2024-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Wavefront sensing and optical surface measurement method based on reference light modulation\",\"authors\":\"Xie Li, Junkang Guo, Kunpeng Liu, Zhigang Liu\",\"doi\":\"10.1016/j.optlaseng.2024.108659\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This paper proposes a reflection-type surface coherent interferometric modulation imaging (R-CIMI) method based on reference light modulation, leveraging the interference light path generated by the reflected beam of the modulator and the target surface. Furthermore, we present a mask optimization strategy to enhance the similarity of diffraction pattern structures, as well as an automatic positioning approach based on optical field estimation. Owing to the anti-disturbance properties of coherent diffraction imaging, R-CIMI is less susceptible to environmental disturbances than conventional interference techniques. Simulations and experiments demonstrate that the proposed method is comparable to conventional interference methods in terms of measurement accuracy.</div></div>\",\"PeriodicalId\":49719,\"journal\":{\"name\":\"Optics and Lasers in Engineering\",\"volume\":\"184 \",\"pages\":\"Article 108659\"},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2024-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Lasers in Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0143816624006377\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Lasers in Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0143816624006377","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
Wavefront sensing and optical surface measurement method based on reference light modulation
This paper proposes a reflection-type surface coherent interferometric modulation imaging (R-CIMI) method based on reference light modulation, leveraging the interference light path generated by the reflected beam of the modulator and the target surface. Furthermore, we present a mask optimization strategy to enhance the similarity of diffraction pattern structures, as well as an automatic positioning approach based on optical field estimation. Owing to the anti-disturbance properties of coherent diffraction imaging, R-CIMI is less susceptible to environmental disturbances than conventional interference techniques. Simulations and experiments demonstrate that the proposed method is comparable to conventional interference methods in terms of measurement accuracy.
期刊介绍:
Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods.
Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following:
-Optical Metrology-
Optical Methods for 3D visualization and virtual engineering-
Optical Techniques for Microsystems-
Imaging, Microscopy and Adaptive Optics-
Computational Imaging-
Laser methods in manufacturing-
Integrated optical and photonic sensors-
Optics and Photonics in Life Science-
Hyperspectral and spectroscopic methods-
Infrared and Terahertz techniques