Fabrication of angle-gradient echelle grating on metallic glass using shaped vibration cutting with time-varying trajectory

In order to solve the problem of narrow band coverage of traditional infrared gratings, a new type of diffraction grating is invented and named as angle-gradient echelle grating. The blaze angle of the grating gradually changes along the direction of the grating grooves, which can be regarded as etching countless sub-gratings with different blaze angles on a grating, breaking the limitation of the number of blaze angles of traditional gratings. In addition, in order to solve the processing problem of angle-gradient echelle grating, a new processing method, shaped vibration cutting (SVC) with a time-varying trajectory is developed. By exploring the influence of different processing parameters on the grating processing results, a suitable processing plan was proposed. Eventually, angle-gradient echelle grating with blaze angles varying from 30° to 55° and surface roughness of as low as 20 nm was fabricated on metallic glass, a material that is difficult to machine.