双级爪式真空泵的热力学模型及其气体增压分析

IF 3.8 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Vacuum Pub Date : 2024-11-12 DOI:10.1016/j.vacuum.2024.113821
Yuanjie Xin , Chunji Ren , Jun Wang , Shiyang Pan , Tao Nie , Zengli Wang , Dong Cui
{"title":"双级爪式真空泵的热力学模型及其气体增压分析","authors":"Yuanjie Xin ,&nbsp;Chunji Ren ,&nbsp;Jun Wang ,&nbsp;Shiyang Pan ,&nbsp;Tao Nie ,&nbsp;Zengli Wang ,&nbsp;Dong Cui","doi":"10.1016/j.vacuum.2024.113821","DOIUrl":null,"url":null,"abstract":"<div><div>Multi-stage claw vacuum pumps are crucial in various industrial applications for efficiently achieving high vacuum levels compared to other positive displacement vacuum pumps. In order to elucidate the gas pressurization process of the multi-stage claw vacuum pump and clarify its structural design principles, the authors investigated a twin-stage claw vacuum pump as the main research subject, and analyzed its working characteristic. A thermodynamic model of the twin-stage claw vacuum pump describing the pressurization process was established, and the results were verified by means of experiments. Moreover, effects of the phase difference <em>φ</em><sub>Ⅰ-Ⅱ</sub>, the first-stage discharge port angle <em>θ</em><sub>d,Ⅰ</sub> and the thickness ratio <em>B</em><sub>1</sub>:<em>B</em><sub>2</sub> on pump performance were discussed. Results show that as <em>φ</em><sub>Ⅰ-Ⅱ</sub> increases, the pump power of the first stage gradually increases, while the power of the second stage decreases and then increases. With the increase of <em>θ</em><sub>d,Ⅰ</sub>, the pump power decreases and then increases. When the suction pressure is 10 kPa, the specific power reaches its minimum value under <em>B</em><sub>1</sub>: <em>B</em><sub>2</sub> = 2:1. As the suction pressure increases, the pump power gradually increases, and its specific power fells substantially and then levels out. These contents are of great significance for the design and optimization of multi-stage claw vacuum pumps.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"232 ","pages":"Article 113821"},"PeriodicalIF":3.8000,"publicationDate":"2024-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermodynamic modelling of a twin-stage claw vacuum pump and its gas pressurization analysis\",\"authors\":\"Yuanjie Xin ,&nbsp;Chunji Ren ,&nbsp;Jun Wang ,&nbsp;Shiyang Pan ,&nbsp;Tao Nie ,&nbsp;Zengli Wang ,&nbsp;Dong Cui\",\"doi\":\"10.1016/j.vacuum.2024.113821\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Multi-stage claw vacuum pumps are crucial in various industrial applications for efficiently achieving high vacuum levels compared to other positive displacement vacuum pumps. In order to elucidate the gas pressurization process of the multi-stage claw vacuum pump and clarify its structural design principles, the authors investigated a twin-stage claw vacuum pump as the main research subject, and analyzed its working characteristic. A thermodynamic model of the twin-stage claw vacuum pump describing the pressurization process was established, and the results were verified by means of experiments. Moreover, effects of the phase difference <em>φ</em><sub>Ⅰ-Ⅱ</sub>, the first-stage discharge port angle <em>θ</em><sub>d,Ⅰ</sub> and the thickness ratio <em>B</em><sub>1</sub>:<em>B</em><sub>2</sub> on pump performance were discussed. Results show that as <em>φ</em><sub>Ⅰ-Ⅱ</sub> increases, the pump power of the first stage gradually increases, while the power of the second stage decreases and then increases. With the increase of <em>θ</em><sub>d,Ⅰ</sub>, the pump power decreases and then increases. When the suction pressure is 10 kPa, the specific power reaches its minimum value under <em>B</em><sub>1</sub>: <em>B</em><sub>2</sub> = 2:1. As the suction pressure increases, the pump power gradually increases, and its specific power fells substantially and then levels out. These contents are of great significance for the design and optimization of multi-stage claw vacuum pumps.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"232 \",\"pages\":\"Article 113821\"},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2024-11-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X24008674\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X24008674","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

与其他容积式真空泵相比,多级爪式真空泵能有效地实现高真空度,因此在各种工业应用中起着至关重要的作用。为了阐明多级爪式真空泵的气体增压过程,明确其结构设计原理,作者以双级爪式真空泵为主要研究对象,分析了其工作特性。建立了描述增压过程的双级爪式真空泵热力学模型,并通过实验对结果进行了验证。此外,还讨论了相位差φⅠ-Ⅱ、第一级出气口角度θd,Ⅰ和厚度比 B1:B2 对泵性能的影响。结果表明,随着φⅠ-Ⅱ的增大,第一级泵的功率逐渐增大,而第二级泵的功率先减小后增大。随着θd,Ⅰ的增大,泵功率先减小后增大。当吸入压力为 10 kPa 时,比功率在 B1: B2 = 2:1 条件下达到最小值。随着吸入压力的增大,泵的功率逐渐增大,比功率大幅下降,然后趋于平稳。这些内容对多级爪式真空泵的设计和优化具有重要意义。
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Thermodynamic modelling of a twin-stage claw vacuum pump and its gas pressurization analysis
Multi-stage claw vacuum pumps are crucial in various industrial applications for efficiently achieving high vacuum levels compared to other positive displacement vacuum pumps. In order to elucidate the gas pressurization process of the multi-stage claw vacuum pump and clarify its structural design principles, the authors investigated a twin-stage claw vacuum pump as the main research subject, and analyzed its working characteristic. A thermodynamic model of the twin-stage claw vacuum pump describing the pressurization process was established, and the results were verified by means of experiments. Moreover, effects of the phase difference φⅠ-Ⅱ, the first-stage discharge port angle θd,Ⅰ and the thickness ratio B1:B2 on pump performance were discussed. Results show that as φⅠ-Ⅱ increases, the pump power of the first stage gradually increases, while the power of the second stage decreases and then increases. With the increase of θd,Ⅰ, the pump power decreases and then increases. When the suction pressure is 10 kPa, the specific power reaches its minimum value under B1: B2 = 2:1. As the suction pressure increases, the pump power gradually increases, and its specific power fells substantially and then levels out. These contents are of great significance for the design and optimization of multi-stage claw vacuum pumps.
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来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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