{"title":"Sn-2.3Ag倒装焊点的冶金反应和高温长期可靠性","authors":"Eun-Su Jang, Jeong-Won Yoon","doi":"10.1016/j.mee.2024.112293","DOIUrl":null,"url":null,"abstract":"<div><div>Flip-chip bonding technology has been extensively applied in the semiconductor packaging field given the recent increase in demand for electronic products requiring miniaturization and high performance. In this study, a high-temperature long-term reliability evaluation was performed to evaluate the metallurgical reaction and mechanical properties at the Sn-2.3Ag (wt%) flip-chip solder bump joints. Isothermal aging was performed for up to 2000 h at 150 °C. A Ni<sub>3</sub>Sn<sub>4</sub> intermetallic compound (IMC) was formed at the interface of the solder joints, and the thickness of the IMC layer increased as the isothermal aging time increased; however, the thickness of Ni under bump metallization (Ni UBM) layer was decreased during the growth of the IMC. Linear regression analysis showed that the growth thickness of the IMC layer and the consumption thickness of the Ni UBM layer varied linearly as functions of the square root of the isothermal aging time. Based on this analysis, the growth rate constant of the IMC layer and consumption rate constant of the Ni UBM layer were 0.000756 and 0.000303 μm/s<sup>1/2</sup>, respectively. Thereafter, shear tests were performed to evaluate the mechanical properties of the solder joints. As the isothermal aging time increased, the variation of shear strength was not large. However, the shear strength decreased slightly and then remained constant. As a result of the analysis of the fractured surface, most conditions exhibited ductile fracture behavior inside the solder bump, while in the case of specimens isothermally aged for 500, 1000, 1500, and 2000 h, cratering occurred. By observing the changes in the fracture mode, the ductile fracture behavior became less prominent, and the occurrence of cratering tended to become more prominent as the isothermal aging time increased.</div></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":"296 ","pages":"Article 112293"},"PeriodicalIF":2.6000,"publicationDate":"2024-11-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Metallurgical reactions and high-temperature long-term reliability of the Sn-2.3Ag flip-chip solder bump\",\"authors\":\"Eun-Su Jang, Jeong-Won Yoon\",\"doi\":\"10.1016/j.mee.2024.112293\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Flip-chip bonding technology has been extensively applied in the semiconductor packaging field given the recent increase in demand for electronic products requiring miniaturization and high performance. In this study, a high-temperature long-term reliability evaluation was performed to evaluate the metallurgical reaction and mechanical properties at the Sn-2.3Ag (wt%) flip-chip solder bump joints. Isothermal aging was performed for up to 2000 h at 150 °C. A Ni<sub>3</sub>Sn<sub>4</sub> intermetallic compound (IMC) was formed at the interface of the solder joints, and the thickness of the IMC layer increased as the isothermal aging time increased; however, the thickness of Ni under bump metallization (Ni UBM) layer was decreased during the growth of the IMC. Linear regression analysis showed that the growth thickness of the IMC layer and the consumption thickness of the Ni UBM layer varied linearly as functions of the square root of the isothermal aging time. Based on this analysis, the growth rate constant of the IMC layer and consumption rate constant of the Ni UBM layer were 0.000756 and 0.000303 μm/s<sup>1/2</sup>, respectively. Thereafter, shear tests were performed to evaluate the mechanical properties of the solder joints. As the isothermal aging time increased, the variation of shear strength was not large. However, the shear strength decreased slightly and then remained constant. As a result of the analysis of the fractured surface, most conditions exhibited ductile fracture behavior inside the solder bump, while in the case of specimens isothermally aged for 500, 1000, 1500, and 2000 h, cratering occurred. By observing the changes in the fracture mode, the ductile fracture behavior became less prominent, and the occurrence of cratering tended to become more prominent as the isothermal aging time increased.</div></div>\",\"PeriodicalId\":18557,\"journal\":{\"name\":\"Microelectronic Engineering\",\"volume\":\"296 \",\"pages\":\"Article 112293\"},\"PeriodicalIF\":2.6000,\"publicationDate\":\"2024-11-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronic Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S016793172400162X\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S016793172400162X","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
近年来,随着电子产品小型化和高性能的需求不断增加,倒装键合技术在半导体封装领域得到了广泛的应用。在本研究中,进行了高温长期可靠性评估,以评估Sn-2.3Ag (wt%)倒装芯片凸点的冶金反应和力学性能。在150℃下等温时效2000 h。在焊点界面处形成Ni3Sn4金属间化合物(IMC),随着等温时效时间的延长,IMC层的厚度增加;而随着IMC的生长,凹凸金属化层(Ni UBM)的厚度逐渐减小。线性回归分析表明,IMC层的生长厚度和Ni UBM层的消耗厚度随等温时效时间的平方根呈线性变化。结果表明,IMC层的生长速率常数为0.000756 μm, Ni UBM层的消耗速率常数为0.000303 μm/s1/2。然后,进行剪切试验来评估焊点的力学性能。随着等温时效时间的延长,抗剪强度变化不大。但抗剪强度略有下降后保持不变。通过对断口表面的分析,大多数情况下,焊点凸起内部表现出延性断裂行为,而在等温时效500、1000、1500和2000小时的情况下,试样出现了凹坑。通过观察断裂方式的变化,随着等温时效时间的延长,韧性断裂行为变得不那么突出,而凹坑的出现有变得更加突出的趋势。
Metallurgical reactions and high-temperature long-term reliability of the Sn-2.3Ag flip-chip solder bump
Flip-chip bonding technology has been extensively applied in the semiconductor packaging field given the recent increase in demand for electronic products requiring miniaturization and high performance. In this study, a high-temperature long-term reliability evaluation was performed to evaluate the metallurgical reaction and mechanical properties at the Sn-2.3Ag (wt%) flip-chip solder bump joints. Isothermal aging was performed for up to 2000 h at 150 °C. A Ni3Sn4 intermetallic compound (IMC) was formed at the interface of the solder joints, and the thickness of the IMC layer increased as the isothermal aging time increased; however, the thickness of Ni under bump metallization (Ni UBM) layer was decreased during the growth of the IMC. Linear regression analysis showed that the growth thickness of the IMC layer and the consumption thickness of the Ni UBM layer varied linearly as functions of the square root of the isothermal aging time. Based on this analysis, the growth rate constant of the IMC layer and consumption rate constant of the Ni UBM layer were 0.000756 and 0.000303 μm/s1/2, respectively. Thereafter, shear tests were performed to evaluate the mechanical properties of the solder joints. As the isothermal aging time increased, the variation of shear strength was not large. However, the shear strength decreased slightly and then remained constant. As a result of the analysis of the fractured surface, most conditions exhibited ductile fracture behavior inside the solder bump, while in the case of specimens isothermally aged for 500, 1000, 1500, and 2000 h, cratering occurred. By observing the changes in the fracture mode, the ductile fracture behavior became less prominent, and the occurrence of cratering tended to become more prominent as the isothermal aging time increased.
期刊介绍:
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.