Feilong Wang , Shuo Wang , Zhiyu Chi , Junbo Niu , Xinghong Zhang , Jinbao Huang , Xinxin Ma
{"title":"磁控溅射与离子注入交替制备Cr/CrxN薄膜的性能研究","authors":"Feilong Wang , Shuo Wang , Zhiyu Chi , Junbo Niu , Xinghong Zhang , Jinbao Huang , Xinxin Ma","doi":"10.1016/j.vacuum.2024.113874","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, the efficacy of Cr/Cr<sub>x</sub>N multilayer films, fabricated on 8Cr4Mo4V bearing steel substrates via Plasma-Based Ion Implantation and Deposition (PBIID) technique, was thoroughly examined. Utilizing a multifunctional coating apparatus, the surface engineering process was optimized for efficiency and precision, yielding controllable periodic Cr/Cr<sub>x</sub>N films. Characterizations conducted with XPS, XRD, and TEM disclosed a 'stacked' stratified film structure that resonates with the process periodicity, characterized by a 17 nm cycle and consisting of dispersed nanocrystalline (Cr, CrN, and Cr<sub>2</sub>N). These multilayer structures markedly enhanced the corrosion resistance of the material, with the treated 8Cr4Mo4V specimens demonstrating a corrosion current density of 2.47 × 10<sup>−7</sup> A cm<sup>−2</sup>, which is an order of magnitude reduction compared to the original sample of 7.60 × 10<sup>−6</sup> A cm<sup>−2</sup>. A series equivalent circuit model was developed to simulate the corrosion dynamics. The nitridation effect induced by ion implantation was instrumental in attaining a surface nanohardness of 19 GPa, approximately doubling the original hardness, while also achieving a coating-substrate adhesion force of 105 mN due to the peening effect. This method can be applied to improve the corrosion resistance life of precision parts, especially complex parts.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"232 ","pages":"Article 113874"},"PeriodicalIF":3.8000,"publicationDate":"2024-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on the properties of Cr/CrxN films prepared by magnetron sputtering and ion implantation alternately\",\"authors\":\"Feilong Wang , Shuo Wang , Zhiyu Chi , Junbo Niu , Xinghong Zhang , Jinbao Huang , Xinxin Ma\",\"doi\":\"10.1016/j.vacuum.2024.113874\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In this study, the efficacy of Cr/Cr<sub>x</sub>N multilayer films, fabricated on 8Cr4Mo4V bearing steel substrates via Plasma-Based Ion Implantation and Deposition (PBIID) technique, was thoroughly examined. Utilizing a multifunctional coating apparatus, the surface engineering process was optimized for efficiency and precision, yielding controllable periodic Cr/Cr<sub>x</sub>N films. Characterizations conducted with XPS, XRD, and TEM disclosed a 'stacked' stratified film structure that resonates with the process periodicity, characterized by a 17 nm cycle and consisting of dispersed nanocrystalline (Cr, CrN, and Cr<sub>2</sub>N). These multilayer structures markedly enhanced the corrosion resistance of the material, with the treated 8Cr4Mo4V specimens demonstrating a corrosion current density of 2.47 × 10<sup>−7</sup> A cm<sup>−2</sup>, which is an order of magnitude reduction compared to the original sample of 7.60 × 10<sup>−6</sup> A cm<sup>−2</sup>. A series equivalent circuit model was developed to simulate the corrosion dynamics. The nitridation effect induced by ion implantation was instrumental in attaining a surface nanohardness of 19 GPa, approximately doubling the original hardness, while also achieving a coating-substrate adhesion force of 105 mN due to the peening effect. This method can be applied to improve the corrosion resistance life of precision parts, especially complex parts.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"232 \",\"pages\":\"Article 113874\"},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2024-11-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X24009205\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X24009205","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
摘要
在本研究中,采用等离子体离子注入沉积(PBIID)技术在8Cr4Mo4V轴承钢衬底上制备了Cr/CrxN多层膜,并对其性能进行了深入研究。利用多功能镀膜装置,优化了表面工程工艺的效率和精度,获得了可控的Cr/CrxN周期膜。通过XPS、XRD和TEM进行表征,发现了一种与工艺周期共振的“堆叠”层状膜结构,其特征为17 nm周期,由分散的纳米晶体(Cr、CrN和Cr2N)组成。这些多层结构显著提高了材料的耐腐蚀性,处理后的8Cr4Mo4V样品的腐蚀电流密度为2.47 × 10−7 a cm−2,与原始样品的7.60 × 10−6 a cm−2相比,降低了一个数量级。建立了串联等效电路模型来模拟腐蚀动力学。离子注入诱导的氮化效应有助于获得19 GPa的表面纳米硬度,大约是原始硬度的两倍,同时由于强化效应,涂层与基体的附着力达到105 mN。该方法可用于提高精密零件,特别是复杂零件的耐腐蚀寿命。
Study on the properties of Cr/CrxN films prepared by magnetron sputtering and ion implantation alternately
In this study, the efficacy of Cr/CrxN multilayer films, fabricated on 8Cr4Mo4V bearing steel substrates via Plasma-Based Ion Implantation and Deposition (PBIID) technique, was thoroughly examined. Utilizing a multifunctional coating apparatus, the surface engineering process was optimized for efficiency and precision, yielding controllable periodic Cr/CrxN films. Characterizations conducted with XPS, XRD, and TEM disclosed a 'stacked' stratified film structure that resonates with the process periodicity, characterized by a 17 nm cycle and consisting of dispersed nanocrystalline (Cr, CrN, and Cr2N). These multilayer structures markedly enhanced the corrosion resistance of the material, with the treated 8Cr4Mo4V specimens demonstrating a corrosion current density of 2.47 × 10−7 A cm−2, which is an order of magnitude reduction compared to the original sample of 7.60 × 10−6 A cm−2. A series equivalent circuit model was developed to simulate the corrosion dynamics. The nitridation effect induced by ion implantation was instrumental in attaining a surface nanohardness of 19 GPa, approximately doubling the original hardness, while also achieving a coating-substrate adhesion force of 105 mN due to the peening effect. This method can be applied to improve the corrosion resistance life of precision parts, especially complex parts.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.