环境空气中复合金刚石/硅微悬臂的声频率梳状产生。

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2025-01-17 DOI:10.1038/s41378-025-00866-x
Zhixin Zhao, Yanyan Li, Wangyang Zhang, Wenyao Luo, Duo Liu
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引用次数: 0

摘要

声波频率梳(AFCs)包含等距相干信号,在计量学上具有非常规的可能性。以前,在空气阻尼损失大的机械微谐振器上实现AFCs是困难的,这限制了它们在大气中的应用。在这项工作中,我们探索了复合金刚石/硅微悬臂在环境空气中参数化产生AFCs的潜力。我们发现,金刚石层提供了一个可行的途径,以减少主弯曲模式的线宽,产生7.1倍的质量因子增加。我们开发了一种参数驱动方案,可以通过注入锁定和涉及次谐波同步(阿诺德舌)和混沌动力学的顺序非线性动态转换来产生afc。最终,我们在空中实现了频率范围扩展到800khz的afc。这项工作促进了对afc的理解,并为其在环境空气中的高精度计量应用提供了一条可行的途径。
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Acoustic frequency comb generation on a composite diamond/silicon microcantilever in ambient air.

Acoustic frequency combs (AFCs) contain equidistant coherent signals with unconventional possibilities on metrology. Previously, implementation of AFCs on mechanical microresonators with large air damping loss is difficult, which restricted their atmospheric applications. In this work, we explore the potentials of a composite diamond/silicon microcantilever for parametric generation of AFCs in ambient air. We discover that the diamond layer provides a viable route to reduce the linewidth of the primary flexural mode, yielding a 7.1-times increase of the quality factor. We develop a parametric driving scheme that enables generation of AFCs through injection locking and sequential nonlinear dynamic transitions involving subharmonic synchronization (Arnold tongue), and chaotic dynamics. Ultimately, we realize AFCs with a frequency range extending 800 kHz in the air. This work advances the understanding of AFCs and provides a viable route towards their applications in ambient air for high precision metrology.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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