基于微机电反射镜的长波光束转向器。

IF 1.5 4区工程技术 Journal of Research of the National Institute of Standards and Technology Pub Date : 2013-03-01 eCollection Date: 2013-01-01 DOI:10.6028/jres.118.006

Anthony B Kos, Eyal Gerecht

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引用次数: 1

摘要

市面上用于扫描长波光束的反射镜对于高速成像来说太大了。需要一种更小、更灵活的指向设备，以便在几秒钟内提供图像，而不是几分钟或几小时。一种快速长波光束转向器采用商用微机电系统(MEMS)镜面，由高性能数字信号处理器(DSP)控制。DSP允许对入射辐射进行高速光栅扫描，将入射辐射聚焦到9毫米(2)的镀金MEMS镜面上，同时获得物体的未失真、高空间分辨率图像。介绍了光束转向器的硬件、软件和性能。该系统还可以作为一个小型化、高性能的长波长波束斩波器，用于锁定检测。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Long-Wavelength Beam Steerer Based on a Micro-Electromechanical Mirror.

Commercially available mirrors for scanning long-wavelength beams are too large for high-speed imaging. There is a need for a smaller, more agile pointing apparatus to provide images in seconds, not minutes or hours. A fast long-wavelength beam steerer uses a commercial micro-electro-mechanical system (MEMS) mirror controlled by a high-performance digital signal processor (DSP). The DSP allows high-speed raster scanning of the incident radiation, which is focused to a small waist onto the 9mm(2), gold-coated, MEMS mirror surface, while simultaneously acquiring an undistorted, high spatial-resolution image of an object. The beam steerer hardware, software and performance are described. The system can also serve as a miniaturized, high-performance long-wavelength beam chopper for lock-in detection.

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来源期刊

Journal of Research of the National Institute of Standards and Technology Engineering-General Engineering

自引率

33.30%

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期刊介绍： The Journal of Research of the National Institute of Standards and Technology is the flagship publication of the National Institute of Standards and Technology. It has been published under various titles and forms since 1904, with its roots as Scientific Papers issued as the Bulletin of the Bureau of Standards. In 1928, the Scientific Papers were combined with Technologic Papers, which reported results of investigations of material and methods of testing. This new publication was titled the Bureau of Standards Journal of Research. The Journal of Research of NIST reports NIST research and development in metrology and related fields of physical science, engineering, applied mathematics, statistics, biotechnology, information technology.