概述了用于制造先进电子应用所需的磷化铟外延结构器件所需的超高纯度铟的制备工艺技术

IF 1.7 4区 工程技术 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Journal of Laser Applications Pub Date : 2023-09-01 DOI:10.2351/7.0001178
V. N. Mani, G. Muthukumaran, A. G. Ramu, J. Kumar
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This review also touched briefly on the use of ultrahigh purity indium in the preparation of TMIn, TEIn, and InCl precursors necessary for the growth of device structures by molecular beam, metal-organic vapor phase, atomic layer epitaxial, and chemical vapor deposition processes. Purifying and preparing polycrystalline indium to a type 7 N purity level as well as standardization and criticality testing for fine-tuning system parameters are essential parts of developing the purification process technology. It also highlights various compound semiconductors and epitaxial systems, such as high purity indium compounds, such as indium phosphide, for cutting-edge electronic applications. Material yield enhancement, impurity management (including C, O, N, and others), consistent results, impurity reduction (down to the ppb level), and class clean packaging are all active topics of research and development. 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引用次数: 0

摘要

铟是一种稀有金属,在锌精炼过程中偶然产生。当生产锌金属时,有价值的元素,如铟,被回收和再利用。硫化物矿物,闪锌矿、方铅矿和黄铜矿,都是铟金属的常见宿主。不同纯度(从99%到99.9%)的铟金属用于许多不同的商业、其他独家、专业、牙科以及研发环境。在磷化铟和相关的选择体单晶(如InP、InAs、InSb等)以及选择基于多层外延材料系统的器件结构(如InGaAs/InP、GaAsP/InP等)的生产中,超高纯度(99.99999%)铟金属被用作初始和主要输入材料之一。没有这些器件拓扑结构,就无法制造发光二极管、红外探测器、激光器和其他组件。由GaInP、GaAs和Ge制成的具有40%转换效率的三结太阳能电池正在被开发用于太空。金属有机和分子束外延方法利用高纯度铟衍生物三甲基/三乙基铟外延前体作为起始材料,开发和制造InGaAs/InP、InGaAsP/InP、InGaN/InP-AlInN等多层结构,以及使用区域精炼-熔融-整平工艺将铟精炼、纯化和超高纯度提纯至更高纯度水平所需的工艺,以及杂质分离考虑因素。还讨论了使用真空、惰性气体环境和外部电磁场来有效地分离、悬浮、搅拌、均匀化和混合熔融区/熔体界面区域(区域),以及ppb水平的纯度分析、级洁净室和包装概念。本文还简要介绍了超高纯铟在通过分子束、金属有机气相、原子层外延和化学气相沉积工艺制备器件结构生长所需的TMIn、TEIn和InCl前体中的应用。提纯和制备7型多晶铟 N纯度水平以及用于微调系统参数的标准化和临界测试是开发纯化工艺技术的重要组成部分。它还重点介绍了用于尖端电子应用的各种化合物半导体和外延系统,如高纯度铟化合物,如磷化铟。提高材料产量、杂质管理(包括C、O、N和其他)、一致的结果、杂质减少(降至ppb水平)和级清洁包装都是研发的活跃主题。对超纯金属的需求有所增加(7-10 N) 在航空航天和国防领域具有严格的纯度标准,用于尖端的纳米电子应用。这篇文献综述深入探讨了这些以及与超高纯铟生产相关的主题。本综述的主要目的是简要总结截至本文撰写之时,超高纯度(7N-99.99999%)铟制备及其外延电子应用方面的研究和开发进展。
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Overview of the process technology for the preparation of ultrahigh purity indium required for the fabrication of indium phosphide related epitaxial structures based devices needed for advanced electronic applications
Indium, a rare metal, is created incidentally during the zinc refining process. When a zinc metal is produced, valuable elements, such as indium, are recovered and reused. The sulfide minerals, sphalerite, galena, and chalcopyrite, are all common hosts for indium metals. Indium metals of varying purities (from 99% to 99.9%) are used in many different commercial, other exclusive, specialty, dentistry, and research and development settings. In the production of indium phosphide and related select bulk single crystals, such as InP, InAs, InSb, etc., and select multilayered epitaxial material-systems based device structures, such as InGaAs/InP, InGaAsP/InP, etc., an ultrahigh purity (99.99999%) indium metal is used as one of the initial and primary input materials. light-emitting diodes, infrared detectors, lasers, and other components cannot be made without these device topologies. Triple junction solar cells made of GaInP, GaAs, and Ge with 40% conversion efficiency are being developed for use in space. Metal-organic and molecular beam epitaxial methods utilize trimethyl/triethyl-indium-epi-precursors, the high purity indium derivatives, as starting materials to develop and manufacture multilayered structures of InGaAs/InP, InGaAsP/InP, InGaN/InP AlInN, etc. The purpose of this review is to quickly touch on indium mineral sources, important uses for different indium metal grades, and the processes needed to refine, purify, and ultrahigh purify indium to higher purity levels using a zone refining–melting–leveling process, as well as impurity segregation considerations. The use of vacuum, inert gas environments, and an external electromagnetic field to efficiently segregate, levitate, stir, homogenize, and mix the molten zone/melt interface area (region) as well as purity analyses at ppb levels, class clean room, and packaging concepts were also discussed. This review also touched briefly on the use of ultrahigh purity indium in the preparation of TMIn, TEIn, and InCl precursors necessary for the growth of device structures by molecular beam, metal-organic vapor phase, atomic layer epitaxial, and chemical vapor deposition processes. Purifying and preparing polycrystalline indium to a type 7 N purity level as well as standardization and criticality testing for fine-tuning system parameters are essential parts of developing the purification process technology. It also highlights various compound semiconductors and epitaxial systems, such as high purity indium compounds, such as indium phosphide, for cutting-edge electronic applications. Material yield enhancement, impurity management (including C, O, N, and others), consistent results, impurity reduction (down to the ppb level), and class clean packaging are all active topics of research and development. There has been a rise in demand for ultrapure metals (7–10 N) with stringent purity criteria in the aerospace and defense sectors, where they are used in cutting-edge nanoelectronic applications. This literature review delves into these and related topics regarding the production of ultrahigh purity indium. The major objective of this review is to provide a concise summary of the research and development progress made toward the ultrahigh purity (7N-99.99999%) indium preparation and its epitaxial electronics application considerations as of the time of this writing.
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来源期刊
CiteScore
3.60
自引率
9.50%
发文量
125
审稿时长
>12 weeks
期刊介绍: The Journal of Laser Applications (JLA) is the scientific platform of the Laser Institute of America (LIA) and is published in cooperation with AIP Publishing. The high-quality articles cover a broad range from fundamental and applied research and development to industrial applications. Therefore, JLA is a reflection of the state-of-R&D in photonic production, sensing and measurement as well as Laser safety. The following international and well known first-class scientists serve as allocated Editors in 9 new categories: High Precision Materials Processing with Ultrafast Lasers Laser Additive Manufacturing High Power Materials Processing with High Brightness Lasers Emerging Applications of Laser Technologies in High-performance/Multi-function Materials and Structures Surface Modification Lasers in Nanomanufacturing / Nanophotonics & Thin Film Technology Spectroscopy / Imaging / Diagnostics / Measurements Laser Systems and Markets Medical Applications & Safety Thermal Transportation Nanomaterials and Nanoprocessing Laser applications in Microelectronics.
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