MAX相作为功能材料的薄膜生长

IF 2.9 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Oxford open materials science Pub Date : 2021-12-24 DOI:10.1093/oxfmat/itab020
Abhijit Biswas, Varun Natu, Anand B. Puthirath
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引用次数: 3

摘要

具有通式Mn+1AXn或MAX(n = 1、2或3,M是早期过渡金属,A主要是第13或14族元素,X是C和/或N)由于陶瓷和金属性质的共存,使纳米材料的世界发生了革命性的变化,产生了优异的机械、热、电、化学性能和广泛的应用。尽管已经开发了几种固态体相合成方法来生产各种MAX相,然而,对于某些应用,MAX相的生长,特别是其高质量外延薄膜形式的生长越来越令人感兴趣。在此,我们总结了迄今为止通过各种沉积技术生长的MAX相薄膜的外延生长和性能评估方面的进展。我们还讨论了薄膜生长方面未来的重要研究方向。总的来说,在未来,高质量的单相外延薄膜生长和化学多样的MAX相的工程可能会为下一代技术开辟有趣的新途径。
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Thin film growth of MAX phases as functional materials
Layered nanolaminate ternary carbides, nitrides and carbonitrides with general formula Mn+1 AXn or MAX (n = 1, 2, or 3, M is an early transition metal, A is mostly group 13 or 14 element, and X is C and/or N) has revolutionized the world of nanomaterials, due to the coexistence of both ceramic and metallic nature, giving rise to exceptional mechanical, thermal, electrical, chemical properties and wide range of applications. Although several solid-state bulk synthesis methods have been developed to produce a variety of MAX phases, however, for certain applications, the growth of MAX phases, especially in its high-quality epitaxial thin films form is of increasing interest. Here, we summarize the progress made thus far in epitaxial growth and property evaluation of MAX phase thin films grown by various deposition techniques. We also address the important future research directions to be made in terms of thin-film growth. Overall, in the future, high-quality single-phase epitaxial thin film growth and engineering of chemically diverse MAX phases may open up interesting new avenues for next-generation technology.
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来源期刊
CiteScore
3.60
自引率
0.00%
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0
审稿时长
7 weeks
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