Renishaw Xl-80激光干涉仪直接比较的方法和结果

O. Samoylenko, O. Adamenko, V. Kalynichenko
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引用次数: 3

摘要

介绍了激光干涉仪的直接比较方法和最小二乘法对干涉测量结果的处理方法。LSM评估了每对干涉仪测量误差的加法部分,也评估了每个干涉仪的测量误差的乘法部分。通过LSM的A带评估所有参数的不确定度。给出了三种干涉仪的比较结果。
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The Method and the Results of the Direct Comparison of the Laser Interferometers Renishaw Xl-80
The method of the direct comparison of the laser interferometers and method processing of the interferometry measurement results by the least square method (LSM) is present. The additive part of the measurement error for each pair of the interferometers is evaluated and the multiplicative part of the measurement error for each interferometer is evaluated too by LSM. Uncertainty by A tape by LSM is evaluated for all parameters. Results of the comparison of the three interferometers are presented.
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