{"title":"纳米光子结构的单色外周光抑制光刻","authors":"Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Z. Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, C. Kuang, Xu Liu","doi":"10.1186/s43074-022-00072-2","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":93483,"journal":{"name":"PhotoniX","volume":"3 1","pages":"1-14"},"PeriodicalIF":15.7000,"publicationDate":"2022-10-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Single-color peripheral photoinhibition lithography of nanophotonic structures\",\"authors\":\"Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Z. Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, C. Kuang, Xu Liu\",\"doi\":\"10.1186/s43074-022-00072-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":93483,\"journal\":{\"name\":\"PhotoniX\",\"volume\":\"3 1\",\"pages\":\"1-14\"},\"PeriodicalIF\":15.7000,\"publicationDate\":\"2022-10-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"PhotoniX\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1186/s43074-022-00072-2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"PhotoniX","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1186/s43074-022-00072-2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 6