{"title":"透射电子显微镜(TEM)对PM-22硅可追溯纳米测量的监测研究及TEM标准物质的制备试验","authors":"Keita Kobayashi","doi":"10.1093/jmicro/dfz089","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":48655,"journal":{"name":"Microscopy","volume":" ","pages":""},"PeriodicalIF":1.5000,"publicationDate":"2019-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1093/jmicro/dfz089","citationCount":"0","resultStr":"{\"title\":\"PM-22 Surveillance study on the SI-traceable nanometrology by transmission electron microscopy (TEM) and trial fabrication of reference materials for TEM\",\"authors\":\"Keita Kobayashi\",\"doi\":\"10.1093/jmicro/dfz089\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":48655,\"journal\":{\"name\":\"Microscopy\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":1.5000,\"publicationDate\":\"2019-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1093/jmicro/dfz089\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microscopy\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1093/jmicro/dfz089\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MICROSCOPY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1093/jmicro/dfz089","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MICROSCOPY","Score":null,"Total":0}
PM-22 Surveillance study on the SI-traceable nanometrology by transmission electron microscopy (TEM) and trial fabrication of reference materials for TEM
期刊介绍:
Microscopy, previously Journal of Electron Microscopy, promotes research combined with any type of microscopy techniques, applied in life and material sciences. Microscopy is the official journal of the Japanese Society of Microscopy.