气溶胶辅助CVD制备碳二亚胺锌薄膜的捷径

Karl M. Kaye, William Grantham, Geoffrey Hyett
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引用次数: 9

摘要

近年来,人们对金属碳二亚胺的兴趣重新抬头,在本文中,我们提出了一种合成方法,以亚微米薄膜的形式合成碳二亚胺锌,以前称为氰酰胺锌,使用气溶胶辅助(AA)CVD从醋酸锌和尿素在甲醇中的溶液中合成,碳二亚胺离子由尿素分子分解形成。薄膜合成在375 - 500°C的沉积温度范围内实现,尿素与醋酸锌的最小比例为2:1,最大比例为5:1,可用于薄膜形成。这项工作提出了使用CVD技术合成ZnNCN薄膜或任何金属碳二亚胺薄膜的第一个例子。
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A Facile Route to Thin Films of Zinc Carbodiimide Using Aerosol-assisted CVD

There has been a resurgence of interest in metal carbodiimides in recent years and in this paper we present a route to the synthesis of one of these phases, zinc carbodiimide, previously known as zinc cyanamide, in the form of a sub-micrometer thin film, using aerosol-assisted (AA)CVD from a solution of zinc acetate and urea in methanol, with the carbodiimide ion being formed from the decomposition of the urea molecule. Thin film synthesis is achieved over a deposition temperature range 375 − 500 °C, with a minimum ratio of urea to zinc acetate of 2:1 and a maximum of 5:1 established as viable for film formation. This work presents the first example of the synthesis of a ZnNCN thin film, or indeed any metal carbodiimide thin film, using a CVD technique.

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Chemical Vapor Deposition
Chemical Vapor Deposition 工程技术-材料科学:膜
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>12 weeks
期刊介绍: Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
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