利用循环分析方法检测材料原子分辨率图像中的缺陷

Oleg S. Ovchinnikov, Andrew O’Hara, Stephen Jesse, Bethany M. Hudak, Shi‐Ze Yang, Andrew R. Lupini, Matthew F. Chisholm, Wu Zhou, Sergei V. Kalinin, Albina Y. Borisevich, Sokrates T. Pantelides
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引用次数: 9

摘要

高角度环形暗场z对比(HAADF)扫描透射电子显微镜(STEM)图像中缺陷的自动检测一直是一个主要挑战。在这里,我们报告了一种基于材料局部原子几何形状变化的结构缺陷自动检测和分类的方法。该方法将几何图理论应用于已经发现的原子柱中心位置,并且能够检测和分类薄双周期结构(即“2D材料”)中的任何缺陷和厚双周期结构(即3D或块状材料)中的大部分缺陷。尽管该方法在检测和分类较厚的块状材料中的缺陷方面的适用性有些有限,但它为缺陷的存在提供了潜在的信息见解。缺陷的分类可以用来筛选大量的数据,并提供关于材料中缺陷分布的统计数据。这种方法适用于从任何类型的高分辨率图像中提取的原子柱位置,但这里我们演示它用于HAADF STEM图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Detection of defects in atomic-resolution images of materials using cycle analysis

The automated detection of defects in high-angle annular dark-field Z-contrast (HAADF) scanning-transmission-electron microscopy (STEM) images has been a major challenge. Here, we report an approach for the automated detection and categorization of structural defects based on changes in the material’s local atomic geometry. The approach applies geometric graph theory to the already-found positions of atomic-column centers and is capable of detecting and categorizing any defect in thin diperiodic structures (i.e., “2D materials”) and a large subset of defects in thick diperiodic structures (i.e., 3D or bulk-like materials). Despite the somewhat limited applicability of the approach in detecting and categorizing defects in thicker bulk-like materials, it provides potentially informative insights into the presence of defects. The categorization of defects can be used to screen large quantities of data and to provide statistical data about the distribution of defects within a material. This methodology is applicable to atomic column locations extracted from any type of high-resolution image, but here we demonstrate it for HAADF STEM images.

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Advanced Structural and Chemical Imaging
Advanced Structural and Chemical Imaging Medicine-Radiology, Nuclear Medicine and Imaging
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