非晶GST225相变材料的激光诱导改性

IF 1.3 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Materiaux & Techniques Pub Date : 2019-01-01 DOI:10.1051/MATTECH/2019008

S. Kozyukhin, P. Lazarenko, Y. Vorobyov, M. Savelyev, A. Polokhin, V. Glukhenkaya, A. Sherchenkov, A. Gerasimenko

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引用次数: 3

摘要

本文研究了非晶GST225薄膜在纳秒激光脉冲照射下的结晶行为。在单脉冲或多脉冲激光照射下产生结晶和熔融淬火的非晶态区域，并通过光学显微镜和微拉曼光谱对其进行了表征。利用原子力显微镜研究了激光修饰区非晶态和晶态之间的过渡区域。采用不同辐照辐照强度的单脉冲激光辐照，验证了辐照辐照强度大于90.4 mJ/cm2时可以结晶。

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Laser-induced modification of amorphous GST225 phase change materials

In this paper, we have studied the crystallization behavior of amorphous GST225 thin films upon irradiation with nanosecond laser pulses. Crystalline and melt-quenched amorphous regions were produced by exposure to laser single or multipulses, and were characterized by the optical microscopy and by the micro-Raman spectroscopy. Transition region between the amorphous and crystalline parts of the laser-modified area was investigated by atomic force microscopy. Using irradiation by single laser pulses with varying fluence, it was verified that crystallization was possible if the fluence is more than 90.4 mJ/cm2.

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来源期刊

Materiaux & Techniques MATERIALS SCIENCE, MULTIDISCIPLINARY-

CiteScore

1.50

自引率

11.10%

发文量

期刊介绍： Matériaux & Techniques informs you, through high-quality and peer-reviewed research papers on research and progress in the domain of materials: physical-chemical characterization, implementation, resistance of materials in their environment (properties of use, modelling)... The journal concerns all materials, metals and alloys, nanotechnology, plastics, elastomers, composite materials, glass or ceramics. This journal for materials scientists, chemists, physicists, ceramicists, engineers, metallurgists and students provides 6 issues per year plus a special issue. Each issue, in addition to scientific articles on specialized topics, also contains selected technical news (conference announcements, new products etc.).