基于激光超声信号小波分析的倒装芯片焊点缺陷检测

Jin Yang, I. C. Ume, Lizheng Zhang
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引用次数: 19

摘要

微电子封装技术已经从通孔封装和批量封装发展到表面贴装封装和小轮廓封装。在表面贴装封装中,如倒装芯片、芯片级封装和球栅阵列,芯片/封装使用凸点连接连接到基板/印刷配线板(PWB)上。隐藏在芯片/封装和基板/电路板之间的焊料凸起在检查时不再可见。利用激光超声和干涉仪技术,研制了一种新型的凸点检测系统。该系统已成功应用于倒装芯片封装、芯片规模封装和地面网格阵列中焊点凸起缺陷的检测,包括缺失、不对准、打开和裂纹焊点缺陷。该系统采用脉冲Nd:YAG激光诱导热弹性超声,采用干涉仪技术测量了封装表面纳米尺度的瞬态面外位移响应。本文对激光超声信号进行了小波分析,并与以往的误差率、相关系数等信号处理方法进行了比较。结果表明,小波分析提高了电子封装中焊点检测的灵敏度。激光超声检查结果也与x射线结果进行比较。本文特别讨论了6.35 mm × 6.35 mm × 0.6 mm PB18倒装芯片封装和具有24个无铅焊点的倒装芯片封装(¿SiMAF¿)的缺陷检测。这两种类型的倒装芯片标本都是非欠填充的。
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Defect Detection of Flip Chip Solder Bumps With Wavelet Analysis of Laser Ultrasound Signals
Microelectronics packaging technology has evolved from through-hole and bulk configuration to surface-mount and small-profile ones. In surface mount packaging, such as flip chips, chip scale packages, and ball grid arrays, chips/packages are attached to the substrates/printed wiring board (PWB) using solder bump interconnections. Solder bumps hidden between the chips/packages and the substrate/board are no longer visible for inspection. A novel solder bump inspection system has been developed using laser ultrasound and interferometer techniques. This system has been successfully applied to detect solder bump defects including missing, misaligned, open, and cracked solder bumps in flip chip packages, chip scale packages and land grid arrays. The system uses a pulsed Nd:YAG laser to induce ultrasound in the thermoelastic regime and the transient out-of-plane displacement response in nanometer scale on the package surface is measured using the interferometer technique. In this paper, wavelet analysis of laser ultrasound signals is presented and compared to previous signal processing methods, such as error ratio and correlation coefficient. The results show that wavelet analysis increases measurement sensitivity for inspecting solder bumps in electronic packages. Laser ultrasound inspection results are also compared to X-ray results. In particular, this paper discusses defect detection for a 6.35 mm × 6.35 mm × 0.6 mm PB18 flip chip package and flip chip package (¿SiMAF¿) with 24 lead-free solder bumps. These two types of flip chip specimens are both nonunderfilled.
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来源期刊
IEEE Transactions on Advanced Packaging
IEEE Transactions on Advanced Packaging 工程技术-材料科学:综合
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