在侧面抛光的光纤上涂覆掺镓氧化锌薄膜的折射率和盐度传感器

IF 0.7 4区 物理与天体物理 Q4 OPTICS Optica Applicata Pub Date : 2021-01-01 DOI:10.37190/OA210102
Chuen-Lin Tien, Hao-Sheng Mao, Tzu-Chi Mao
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引用次数: 0

摘要

本文提出了一种采用光纤侧抛光和电子束蒸发技术的高灵敏度折射率和盐度传感器。在侧面抛光的光纤表面涂覆薄膜,可产生损耗模共振效应。采用电子束蒸发离子辅助沉积法制备了掺镓氧化锌(GZO)薄膜。侧面抛光后的光纤残余厚度为76.5 μm,在侧面抛光后的光纤表面沉积了69 nm厚的GZO膜,用于制备基于lmr的光纤传感器。用不同折射率的生理盐水溶液测量了lmr光纤传感器的光谱变化。LMR的波长位移是由折射率变化引起的,折射率变化几乎与盐度成正比。光纤传感器的折射率范围为1.333 ~ 1.398,灵敏度为3059 nm/RIU(折射率单位)。为了评估LMR盐度传感器的灵敏度,本工作测量了3.6%、7.3%、10.9%、14.6%、18.2%和21.9%的盐水溶液盐度。实验结果表明,该传感器的灵敏度为9.94 nm/%。
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Refractive index and salinity sensors by gallium-doped zinc oxide thin film coated on side-polished fibers
This work presents a high-sensitivity refractive index and salinity sensor by using fiber-optic side -polishing and electron-beam evaporation techniques. Thin film coated on the flat surface of side -polished fibers can generate a lossy mode resonance (LMR) effect. A gallium-doped zinc oxide (GZO) thin film was prepared by an electron-beam evaporation with the ion assisted deposition method. The residual thickness of the side-polished fiber was 76.5 μm, and GZO film thickness of 69 nm was deposited on the flat surface of the side-polished fiber to fabricate LMR-based fiber sensors. The variation in the optical spectrum of LMR-based fiber sensors was measured by different refractive index saline solutions. The LMR wavelength shift is caused by the refractive index change, which is nearly proportional to the salinity. The corresponding sensitivity of the proposed fiber-optic sensor was 3059 nm/RIU (refractive index unit) for the refractive index range of 1.333 to 1.398. To evaluate the sensitivity of LMR salinity sensors, the saline solution salinities of 3.6%, 7.3%, 10.9%, 14.6%, 18.2% and 21.9% were measured in this work. The experimental result shows that the sensitivity of the proposed salinity sensor is 9.94 nm/%.
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来源期刊
Optica Applicata
Optica Applicata 物理-光学
CiteScore
1.00
自引率
16.70%
发文量
21
审稿时长
4 months
期刊介绍: Acoustooptics, atmospheric and ocean optics, atomic and molecular optics, coherence and statistical optics, biooptics, colorimetry, diffraction and gratings, ellipsometry and polarimetry, fiber optics and optical communication, Fourier optics, holography, integrated optics, lasers and their applications, light detectors, light and electron beams, light sources, liquid crystals, medical optics, metamaterials, microoptics, nonlinear optics, optical and electron microscopy, optical computing, optical design and fabrication, optical imaging, optical instrumentation, optical materials, optical measurements, optical modulation, optical properties of solids and thin films, optical sensing, optical systems and their elements, optical trapping, optometry, photoelasticity, photonic crystals, photonic crystal fibers, photonic devices, physical optics, quantum optics, slow and fast light, spectroscopy, storage and processing of optical information, ultrafast optics.
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