半埋式1×32光分路器复合制造方法研究

IF 0.7 4区 物理与天体物理 Q4 OPTICS Optica Applicata Pub Date : 2023-01-01 DOI:10.37190/oa230202
Qing Tao, Sihao Xie
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引用次数: 0

摘要

本文提出了一种降低硅沟槽内表面粗糙度的复合制造方法。首先用飞秒激光烧蚀二氧化硅沟槽,然后用5%浓度的氢氟酸溶液腐蚀二氧化硅沟槽内表面。其次,将Su8胶粘剂填充到凹槽内,用博士刀形成半埋式1×32光分路器。测试结果表明,表面粗糙度Ra小于0.2µm,输出端口平均插入损耗为21.34 dB,均匀性小于1.44 dB。与传统飞秒激光烧蚀方法相比,表面粗糙度降低了至少0.1µm,输出端口的平均插入损耗降低了1.22 dB,均匀性降低了0.41 dB。因此,复合制造方法提高了通信性能。满足了光电印刷电路板对光互连的要求。
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Research on composite manufacturing method of semi-buried 1×32 optical splitter
In this paper, a composite manufacturing method was proposed to reduce the inner surface roughness of silica groove. Firstly, femtosecond laser was used to ablate the silica groove, then, a 5% concentration hydrofluoric acid solution was used to corrode the inner surface of silica groove. Secondly, Su8 adhesive was filled with the groove to form a semi-buried 1×32 optical splitter by doctor blade. The test results showed that the surface roughness Ra was less than 0.2 µm, and average insertion loss of output ports was 21.34 dB, moreover, the uniformity was less than 1.44 dB. Compared with the traditional femtosecond laser ablating method, surface roughness reduced by at least 0.1 µm, and the average insertion loss of output ports was reduced by 1.22 dB, and the uniformity was reduced by 0.41 dB. So, the composite manufacturing method improved the communication performance. It is satisfied with the requirements for optical interconnection in the electro-optical printed circuit boards.
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来源期刊
Optica Applicata
Optica Applicata 物理-光学
CiteScore
1.00
自引率
16.70%
发文量
21
审稿时长
4 months
期刊介绍: Acoustooptics, atmospheric and ocean optics, atomic and molecular optics, coherence and statistical optics, biooptics, colorimetry, diffraction and gratings, ellipsometry and polarimetry, fiber optics and optical communication, Fourier optics, holography, integrated optics, lasers and their applications, light detectors, light and electron beams, light sources, liquid crystals, medical optics, metamaterials, microoptics, nonlinear optics, optical and electron microscopy, optical computing, optical design and fabrication, optical imaging, optical instrumentation, optical materials, optical measurements, optical modulation, optical properties of solids and thin films, optical sensing, optical systems and their elements, optical trapping, optometry, photoelasticity, photonic crystals, photonic crystal fibers, photonic devices, physical optics, quantum optics, slow and fast light, spectroscopy, storage and processing of optical information, ultrafast optics.
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