{"title":"用于干燥环境监测的片上法布里-珀罗干涉仪的低成本制造","authors":"Régis Guertin, M. Bianki, Y. Peter","doi":"10.1109/OMN/SBFotonIOPC58971.2023.10230951","DOIUrl":null,"url":null,"abstract":"A silicon (110) on-chip in-plane Fabry-Perot in-terferometer (FPI) with fiber grooves and polymer reservoirs is fabricated through a single anisotropic wet etching process, resulting in high verticality and low roughness. The FPI exhibits high finesse and Q factors and is functionalized with polymers to enable temperature and gas sensing.","PeriodicalId":31141,"journal":{"name":"Netcom","volume":"32 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Low-cost fabrication of an on-chip Fabry-Perot interferometer for dry environmental monitoring\",\"authors\":\"Régis Guertin, M. Bianki, Y. Peter\",\"doi\":\"10.1109/OMN/SBFotonIOPC58971.2023.10230951\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A silicon (110) on-chip in-plane Fabry-Perot in-terferometer (FPI) with fiber grooves and polymer reservoirs is fabricated through a single anisotropic wet etching process, resulting in high verticality and low roughness. The FPI exhibits high finesse and Q factors and is functionalized with polymers to enable temperature and gas sensing.\",\"PeriodicalId\":31141,\"journal\":{\"name\":\"Netcom\",\"volume\":\"32 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Netcom\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230951\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Netcom","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230951","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Low-cost fabrication of an on-chip Fabry-Perot interferometer for dry environmental monitoring
A silicon (110) on-chip in-plane Fabry-Perot in-terferometer (FPI) with fiber grooves and polymer reservoirs is fabricated through a single anisotropic wet etching process, resulting in high verticality and low roughness. The FPI exhibits high finesse and Q factors and is functionalized with polymers to enable temperature and gas sensing.
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