多层石墨烯纳米带互连的电阻率研究

2019 27th Iranian Conference on Electrical Engineering (ICEE) Pub Date : 2019-04-01 DOI:10.1109/IranianCEE.2019.8786551

M. Sanaeepur

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引用次数: 7

摘要

采用半经典方法计算了衬底表面粗糙度对石墨烯纳米带(GNR)电阻率的影响，从而计算了具有完美边缘的多层石墨烯纳米带(MLGNR)互连的电阻。结果表明，除了线边粗糙度外，下垫介质材料的表面粗糙度也会严重增加MLGNR互连的电阻，因此在设计时必须考虑到这一点。

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On the Resistivity of Multi-Layer Graphene Nanoribbon Interconnects

The effect of substrate surface roughness on the resistivity of graphene nanoribbons (GNRs) and consequently the resistance of multy-layer GNR (MLGNR) interconnects with perfect edges is semiclassically calculated. Results show that besides line edge roughness, the surface roughness of underlying dielectric material can severely increase the resistance of MLGNR interconnects, hence, it must be considered in design considerations.

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2019 27th Iranian Conference on Electrical Engineering (ICEE)

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