作为稀薄气体传感器的MWCNT嵌入式微机械谐振器的研制

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474412

H. Kishihara, I. Hanasaki, N. Matsuzuka, I. Yamashita, Y. Uraoka, Y. Isono

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摘要

本研究开发了多壁碳纳米管嵌入式微机械谐振器，作为一种新型的稀薄气体传感器。稀薄气体流体的惯性效应表现为谐振频率的变化，谐振腔与气体分子之间相互作用能量的耗散影响振荡的阻尼。因此，可以用一个装置来区分两种气体。为了提高谐振器的灵敏度，采用生物mems兼容工艺，在谐振器上放置了MWCNTs。MWCNTs嵌入谐振器已成功证明可以在0.02 Pa至0.9 Pa的压力下检测和区分氢气和氮气。

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Development of MWCNT embedded micromechanical resonator working as rarefied gas sensor

This research has newly developed the multi-wall carbon nanotubes (MWCNTs) embedded-micro-mechanical resonator working as a novel rarefied gas sensor. The inertial effect of rarefied gas fluid is detected as a variation of the resonance frequency, and the dissipation of the interaction energy between the resonator and the gas molecules affects the damping of oscillation. Thus, two kinds of gaseous species can be distinguished with one device. The MWCNTs have been arranged on the resonator for heightening its sensitivity by the bio-MEMS compatible process. The MWCNTs embedded-resonator has successfully demonstrated to detect and distinguish hydrogen and nitrogen gases under pressures of 0.02 Pa to 0.9 Pa.

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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