用注射成型焊料制造的四元低温凸点倒装芯片连接

T. Hisada, T. Aoki, Eiji Nakamura, S. Kohara, H. Mori
{"title":"用注射成型焊料制造的四元低温凸点倒装芯片连接","authors":"T. Hisada, T. Aoki, Eiji Nakamura, S. Kohara, H. Mori","doi":"10.4071/2380-4505-2019.1.000103","DOIUrl":null,"url":null,"abstract":"\n IBM has developed and has been enhancing the injection molded solder (IMS) technology as an advanced solder bumping technology with flexible solder alloy composition applicable even to fine pitch and small diameter systems. IMS is a simple bumping technology that can form solder bumps by injection of molten solder into via holes patterned in a photoresist layer. IMS is applicable to formation of solder caps for Cu pillar bumping which is a technology widely used for fine pitch applications. One of the advantages of IMS is the capability of using ternary, quaternary, or more compositions solder alloys for bumping, which is not achievable by current plating technology. In this study, the feasibility of IMS bumping and flip chip joining with quaternary solder alloys is demonstrated through assembling of 2.5D package test vehicles using low melting temperature (135°C) SnBi based quaternary alloy solder and associated reliability test. The test vehicles passed the 2250 cycles criteria of thermal cycling test and the observation of microstructures showed that there is no significant crack at the solder joints after flip chip joining or after the 2250 cycles of thermal cycling test. In addition, the tensile test on SnBi based quaternary alloy solder, Sn-58wt%Bi-2.0wt%In with small amount of Pd (less than 1wt%) was conducted using fine diameter specimens. From the SS curve obtained from the test, Young's modulus of the solder was determined as 7.3 GPa and 0.2% proof stress was obtained as 73 MPa both at 25°C. The creep property of the solder was evaluated and the constants for Norton's creep law for the solder were determined at 25, 80 and 110°C. The microstructure observation and Energy Dispersive X-ray (EDX) analysis of the flip chip joints revealed the formation of a thick bismuth (Bi) layer between CuSn intermetallic compound (IMC) layers within a joint. The mechanical simulation of the 2.5D test vehicles showed that the thermomechanical stress of a flip chip joint with Bi/CuSn IMCs at thermal cycling condition is comparable to those of CuSn IMC or Sn-3.0Ag-0.5Cu (SAC305) solder joints consistent with the thermal cycling test result. The advantage of using low temperature quaternary solder materials in flip chip packages is confirmed by mechanical simulation of 2D packages at reflow condition which showed lower stress on low-k dielectric layers for the packages with quaternary solder joints than for the packages with SAC305 solder joints.","PeriodicalId":14363,"journal":{"name":"International Symposium on Microelectronics","volume":"30 2 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Flip Chip Joining with Quaternary Low Melting Temperature Solder Bump Fabricated with Injection Molded Solder\",\"authors\":\"T. Hisada, T. Aoki, Eiji Nakamura, S. Kohara, H. Mori\",\"doi\":\"10.4071/2380-4505-2019.1.000103\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n IBM has developed and has been enhancing the injection molded solder (IMS) technology as an advanced solder bumping technology with flexible solder alloy composition applicable even to fine pitch and small diameter systems. IMS is a simple bumping technology that can form solder bumps by injection of molten solder into via holes patterned in a photoresist layer. IMS is applicable to formation of solder caps for Cu pillar bumping which is a technology widely used for fine pitch applications. One of the advantages of IMS is the capability of using ternary, quaternary, or more compositions solder alloys for bumping, which is not achievable by current plating technology. In this study, the feasibility of IMS bumping and flip chip joining with quaternary solder alloys is demonstrated through assembling of 2.5D package test vehicles using low melting temperature (135°C) SnBi based quaternary alloy solder and associated reliability test. The test vehicles passed the 2250 cycles criteria of thermal cycling test and the observation of microstructures showed that there is no significant crack at the solder joints after flip chip joining or after the 2250 cycles of thermal cycling test. In addition, the tensile test on SnBi based quaternary alloy solder, Sn-58wt%Bi-2.0wt%In with small amount of Pd (less than 1wt%) was conducted using fine diameter specimens. From the SS curve obtained from the test, Young's modulus of the solder was determined as 7.3 GPa and 0.2% proof stress was obtained as 73 MPa both at 25°C. The creep property of the solder was evaluated and the constants for Norton's creep law for the solder were determined at 25, 80 and 110°C. The microstructure observation and Energy Dispersive X-ray (EDX) analysis of the flip chip joints revealed the formation of a thick bismuth (Bi) layer between CuSn intermetallic compound (IMC) layers within a joint. The mechanical simulation of the 2.5D test vehicles showed that the thermomechanical stress of a flip chip joint with Bi/CuSn IMCs at thermal cycling condition is comparable to those of CuSn IMC or Sn-3.0Ag-0.5Cu (SAC305) solder joints consistent with the thermal cycling test result. The advantage of using low temperature quaternary solder materials in flip chip packages is confirmed by mechanical simulation of 2D packages at reflow condition which showed lower stress on low-k dielectric layers for the packages with quaternary solder joints than for the packages with SAC305 solder joints.\",\"PeriodicalId\":14363,\"journal\":{\"name\":\"International Symposium on Microelectronics\",\"volume\":\"30 2 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-12-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Microelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.4071/2380-4505-2019.1.000103\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4071/2380-4505-2019.1.000103","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

摘要

IBM已经开发并一直在加强注塑焊料(IMS)技术,作为一种先进的焊料碰撞技术,具有灵活的焊料合金成分,甚至适用于小间距和小直径系统。IMS是一种简单的碰撞技术,可以通过将熔融焊料注入光刻胶层上的孔中形成焊料碰撞。IMS适用于铜柱碰撞焊帽的形成,这是一种广泛应用于细间距应用的技术。IMS的优点之一是能够使用三元,四元或更多成分的钎料合金进行碰撞,这是目前电镀技术无法实现的。在本研究中,通过使用低温(135℃)SnBi基四元合金焊料组装2.5D封装测试车,并进行相关可靠性测试,验证了IMS碰撞和四元合金倒装芯片连接的可行性。试验车辆通过了2250次热循环试验的标准,显微组织观察表明,倒装片连接和2250次热循环试验后,焊点处没有明显的裂纹。此外,采用细径试样对SnBi基四元合金钎料Sn-58wt%Bi-2.0wt%In和少量Pd(小于1wt%)进行了拉伸试验。根据试验得到的SS曲线,在25℃下,钎料的杨氏模量为7.3 GPa, 0.2%的抗应力为73 MPa。测定了焊料在25、80和110℃时的蠕变性能,并测定了焊料的诺顿蠕变常数。通过对倒装芯片接头的微观结构观察和能量色散x射线(EDX)分析发现,在接头内CuSn金属间化合物(IMC)层之间形成了一层厚的铋(Bi)层。2.5D试验车的力学模拟表明,Bi/CuSn IMC倒装接头在热循环条件下的热机械应力与CuSn IMC或Sn-3.0Ag-0.5Cu (SAC305)焊点的热机械应力相当,与热循环试验结果一致。通过对二维封装在回流条件下的力学模拟,验证了低温季系钎料在倒装封装中的优势,结果表明,与SAC305钎料相比,低温季系钎料在低k介电层上的应力更小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Flip Chip Joining with Quaternary Low Melting Temperature Solder Bump Fabricated with Injection Molded Solder
IBM has developed and has been enhancing the injection molded solder (IMS) technology as an advanced solder bumping technology with flexible solder alloy composition applicable even to fine pitch and small diameter systems. IMS is a simple bumping technology that can form solder bumps by injection of molten solder into via holes patterned in a photoresist layer. IMS is applicable to formation of solder caps for Cu pillar bumping which is a technology widely used for fine pitch applications. One of the advantages of IMS is the capability of using ternary, quaternary, or more compositions solder alloys for bumping, which is not achievable by current plating technology. In this study, the feasibility of IMS bumping and flip chip joining with quaternary solder alloys is demonstrated through assembling of 2.5D package test vehicles using low melting temperature (135°C) SnBi based quaternary alloy solder and associated reliability test. The test vehicles passed the 2250 cycles criteria of thermal cycling test and the observation of microstructures showed that there is no significant crack at the solder joints after flip chip joining or after the 2250 cycles of thermal cycling test. In addition, the tensile test on SnBi based quaternary alloy solder, Sn-58wt%Bi-2.0wt%In with small amount of Pd (less than 1wt%) was conducted using fine diameter specimens. From the SS curve obtained from the test, Young's modulus of the solder was determined as 7.3 GPa and 0.2% proof stress was obtained as 73 MPa both at 25°C. The creep property of the solder was evaluated and the constants for Norton's creep law for the solder were determined at 25, 80 and 110°C. The microstructure observation and Energy Dispersive X-ray (EDX) analysis of the flip chip joints revealed the formation of a thick bismuth (Bi) layer between CuSn intermetallic compound (IMC) layers within a joint. The mechanical simulation of the 2.5D test vehicles showed that the thermomechanical stress of a flip chip joint with Bi/CuSn IMCs at thermal cycling condition is comparable to those of CuSn IMC or Sn-3.0Ag-0.5Cu (SAC305) solder joints consistent with the thermal cycling test result. The advantage of using low temperature quaternary solder materials in flip chip packages is confirmed by mechanical simulation of 2D packages at reflow condition which showed lower stress on low-k dielectric layers for the packages with quaternary solder joints than for the packages with SAC305 solder joints.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Advanced Packaging Technology for Novel 1-dimensional and 2-dimensional VCSEL Arrays The Pivotal Role of Uniformity of Electrolytic Deposition Processes to Improve the Reliability of Advanced Packaging Enhancing the Paste Release on 55μm pads with Water-Soluble Type 7 SAC305 Solder Paste for High Density SIP Application Coronavirus, chip boom, and supply shortage: The new normal for global semiconductor manufacturing Lithography Solutions for Submicron Panel-Level Packaging
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1