{"title":"先进材料和器件的微/纳米加工和表征","authors":"Yanxi Li, Liang He, Mengyu Yan, Zhengjun Wang","doi":"10.1155/2019/5032747","DOIUrl":null,"url":null,"abstract":"Department of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061, USA State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China Department of Materials Science and Engineering, University of Washington, Seattle, WA 98195, USA Department of Physics and Astronomy, West Virginia University, Morgantown, WV 26506, USA","PeriodicalId":16378,"journal":{"name":"Journal of Nanotechnology","volume":null,"pages":null},"PeriodicalIF":3.9000,"publicationDate":"2019-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Micro/Nanofabrication and Characterization of Advanced Materials and Devices\",\"authors\":\"Yanxi Li, Liang He, Mengyu Yan, Zhengjun Wang\",\"doi\":\"10.1155/2019/5032747\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Department of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061, USA State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China Department of Materials Science and Engineering, University of Washington, Seattle, WA 98195, USA Department of Physics and Astronomy, West Virginia University, Morgantown, WV 26506, USA\",\"PeriodicalId\":16378,\"journal\":{\"name\":\"Journal of Nanotechnology\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":3.9000,\"publicationDate\":\"2019-09-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Nanotechnology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1155/2019/5032747\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"NANOSCIENCE & NANOTECHNOLOGY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Nanotechnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1155/2019/5032747","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"NANOSCIENCE & NANOTECHNOLOGY","Score":null,"Total":0}
Micro/Nanofabrication and Characterization of Advanced Materials and Devices
Department of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061, USA State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China Department of Materials Science and Engineering, University of Washington, Seattle, WA 98195, USA Department of Physics and Astronomy, West Virginia University, Morgantown, WV 26506, USA