用固定光束移动台电子束光刻技术制作锥形波导的方法

IF 1.5 2区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micro/Nanolithography, MEMS, and MOEMS Pub Date : 2019-10-01 DOI:10.1117/1.JMM.18.4.043503
V. Mere, S. Selvaraja
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引用次数: 3

摘要

摘要提出了一种利用固定电子束移动级(FBMS)路径使波导变细的方法。锥形是通过将两个FBMS路径连接到一个公共点来实现的。与传统的面积渐变和FBMS渐变方法相比,该方法在不同宽度的波导之间提供了平滑和无对准误差的渐变。我们通过实验演示了一个全功能的FBMS图像化光子电路,该电路具有功率分路器、线槽耦合器、槽波导和槽环形谐振器。在1550 nm波长附近测量了器件的响应,插入损耗为−1.35 dB。
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Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography
Abstract. A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35  dB is measured around 1550-nm wavelength.
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来源期刊
CiteScore
3.40
自引率
30.40%
发文量
0
审稿时长
6-12 weeks
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