{"title":"用固定光束移动台电子束光刻技术制作锥形波导的方法","authors":"V. Mere, S. Selvaraja","doi":"10.1117/1.JMM.18.4.043503","DOIUrl":null,"url":null,"abstract":"Abstract. A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35 dB is measured around 1550-nm wavelength.","PeriodicalId":16522,"journal":{"name":"Journal of Micro/Nanolithography, MEMS, and MOEMS","volume":"45 1","pages":"043503 - 043503"},"PeriodicalIF":1.5000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography\",\"authors\":\"V. Mere, S. Selvaraja\",\"doi\":\"10.1117/1.JMM.18.4.043503\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract. A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35 dB is measured around 1550-nm wavelength.\",\"PeriodicalId\":16522,\"journal\":{\"name\":\"Journal of Micro/Nanolithography, MEMS, and MOEMS\",\"volume\":\"45 1\",\"pages\":\"043503 - 043503\"},\"PeriodicalIF\":1.5000,\"publicationDate\":\"2019-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Micro/Nanolithography, MEMS, and MOEMS\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1117/1.JMM.18.4.043503\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micro/Nanolithography, MEMS, and MOEMS","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1117/1.JMM.18.4.043503","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography
Abstract. A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35 dB is measured around 1550-nm wavelength.