残余极化线性晶间变化对负电容场效应晶体管的影响

K. Qureshi, G. Pahwa, Y. Chauhan
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摘要

我们对双栅(DG) NCFET的多晶铁电层残余极化(Pr)的可变性的影响进行了解释性研究。考虑(i)源端作为参考点,(ii)漏端作为参考点,并将百分比值推进到另一端,我们分析了Pr中粒间线性方差的影响。该研究评估了该器件在长栅极和短栅极两种不同铁电厚度下的性能。在施加漏极偏置的低值和高值情况下,电特性表现出不同的行为。而对于低漏极电压,可以得到直观的结果,高漏极电压特性具有明显的亚阈值摆幅(SS)从其初始恶化值减小的趋势,Pr方差的大小从源极到漏极减小,而从漏极到源极则相反。在此基础上,我们进一步得出结论,为了防止迟滞效应,对于长通道器件,第一粒和最后粒之间的颗粒变化不应超过25%,对于短通道器件,颗粒变化不应超过20%。
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Impact of Linear Intergranular Variation in Remnant Polarization on Negative Capacitance Field Effect Transistor
We present an explicable study of the impact of variability in the remnant polarization (Pr) of the polycrystalline ferroelectric layer of a double gate (DG) NCFET. We analyze the impact of intergranular linear variance in Pr considering (i) source end as reference point and (ii) drain end as reference point with the percentage value advancing to the other end. The study evaluates the device performance at various ferroelectric thicknesses for both long as well as short gate lengths. The electrical characteristics exhibit different behaviour for low and high values of applied drain bias. While for low drain voltage, intuitive results are obtained, high drain voltage characteristics follow a distinct trend of subthreshold swing (SS) decreasing from its initially deteriorated value, as the magnitude of Pr variance decreases from source to drain, whereas the tendency is reversed moving from drain to source. Based on the results, we further conclude that in order to prevent the hysteric effects, the granular variation between the first and the last grain should not exceed 25% for long channel and 20% for short channel devices.
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