{"title":"基于固定电子束移动阶段图形技术的硅槽波导马赫-曾德尔","authors":"V. Mere, S. Selvaraja","doi":"10.1109/icee44586.2018.8937940","DOIUrl":null,"url":null,"abstract":"We demonstrate a fixed electron beam (e-beam) moving stage patterned photonics integrated circuit on Silicon-on-insulator platform. The circuit demonstrator consists of power splitter/combiner, wire-to-slot couplers, bend waveguide, and wire waveguides. We present a slot Mach-Zehnder interferometer (MZI) in 1550 nm band with efficient slot mode excitation. We verify slot mode excitation using numerical calculation.","PeriodicalId":6590,"journal":{"name":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","volume":"82 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Silicon Slot Waveguide Mach-Zehnder Using Fixed Electron Beam Moving Stage Patterning Technique\",\"authors\":\"V. Mere, S. Selvaraja\",\"doi\":\"10.1109/icee44586.2018.8937940\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate a fixed electron beam (e-beam) moving stage patterned photonics integrated circuit on Silicon-on-insulator platform. The circuit demonstrator consists of power splitter/combiner, wire-to-slot couplers, bend waveguide, and wire waveguides. We present a slot Mach-Zehnder interferometer (MZI) in 1550 nm band with efficient slot mode excitation. We verify slot mode excitation using numerical calculation.\",\"PeriodicalId\":6590,\"journal\":{\"name\":\"2018 4th IEEE International Conference on Emerging Electronics (ICEE)\",\"volume\":\"82 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 4th IEEE International Conference on Emerging Electronics (ICEE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/icee44586.2018.8937940\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/icee44586.2018.8937940","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Silicon Slot Waveguide Mach-Zehnder Using Fixed Electron Beam Moving Stage Patterning Technique
We demonstrate a fixed electron beam (e-beam) moving stage patterned photonics integrated circuit on Silicon-on-insulator platform. The circuit demonstrator consists of power splitter/combiner, wire-to-slot couplers, bend waveguide, and wire waveguides. We present a slot Mach-Zehnder interferometer (MZI) in 1550 nm band with efficient slot mode excitation. We verify slot mode excitation using numerical calculation.
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