{"title":"纳米微定位台的设计与仿真","authors":"Xie Xiaohui, Du Ruxu, S. Qiang","doi":"10.1504/IJMIC.2009.027019","DOIUrl":null,"url":null,"abstract":"Micro positioning stage is a commonly used platform for MEMS. In this article, we present a new micro positioning stage including its design, simulation and optimisation. The new micro positioning stage is made of four sets of two leaf springs. The geometric dimensions are determined by optimisation. Its performance, including stress and displacement, is evaluated using finite element analysis by ANSYS. The simulation results indicated that the new design can reliably achieve nano position accuracy.","PeriodicalId":46456,"journal":{"name":"International Journal of Modelling Identification and Control","volume":"20 1","pages":"15-19"},"PeriodicalIF":0.6000,"publicationDate":"2009-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design and simulation of a nano-scale micro positioning stage\",\"authors\":\"Xie Xiaohui, Du Ruxu, S. Qiang\",\"doi\":\"10.1504/IJMIC.2009.027019\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Micro positioning stage is a commonly used platform for MEMS. In this article, we present a new micro positioning stage including its design, simulation and optimisation. The new micro positioning stage is made of four sets of two leaf springs. The geometric dimensions are determined by optimisation. Its performance, including stress and displacement, is evaluated using finite element analysis by ANSYS. The simulation results indicated that the new design can reliably achieve nano position accuracy.\",\"PeriodicalId\":46456,\"journal\":{\"name\":\"International Journal of Modelling Identification and Control\",\"volume\":\"20 1\",\"pages\":\"15-19\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2009-07-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Modelling Identification and Control\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1504/IJMIC.2009.027019\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"AUTOMATION & CONTROL SYSTEMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Modelling Identification and Control","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1504/IJMIC.2009.027019","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"AUTOMATION & CONTROL SYSTEMS","Score":null,"Total":0}
Design and simulation of a nano-scale micro positioning stage
Micro positioning stage is a commonly used platform for MEMS. In this article, we present a new micro positioning stage including its design, simulation and optimisation. The new micro positioning stage is made of four sets of two leaf springs. The geometric dimensions are determined by optimisation. Its performance, including stress and displacement, is evaluated using finite element analysis by ANSYS. The simulation results indicated that the new design can reliably achieve nano position accuracy.
期刊介绍：
Most of the research and experiments in the fields of science, engineering, and social studies have spent significant efforts to find rules from various complicated phenomena by observations, recorded data, logic derivations, and so on. The rules are normally summarised as concise and quantitative expressions or “models". “Identification" provides mechanisms to establish the models and “control" provides mechanisms to improve the system (represented by its model) performance. IJMIC is set up to reflect the relevant generic studies in this area.
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