A. Llobera, V. Seidemann, J. Plaza, V. Cadarso, S. Buttgenbach
{"title":"表面四光束聚合物光学加速度计","authors":"A. Llobera, V. Seidemann, J. Plaza, V. Cadarso, S. Buttgenbach","doi":"10.1109/ICSENS.2004.1426484","DOIUrl":null,"url":null,"abstract":"The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Surface quad beam polymer optical accelerometer\",\"authors\":\"A. Llobera, V. Seidemann, J. Plaza, V. Cadarso, S. Buttgenbach\",\"doi\":\"10.1109/ICSENS.2004.1426484\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.\",\"PeriodicalId\":20476,\"journal\":{\"name\":\"Proceedings of IEEE Sensors, 2004.\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2004.1426484\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426484","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.
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