表面四光束聚合物光学加速度计

A. Llobera, V. Seidemann, J. Plaza, V. Cadarso, S. Buttgenbach
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引用次数: 4

摘要

介绍了一种四光束聚合物光学加速度计的设计、仿真和性能表征。其工作原理是基于强度的调制,通过引起位于框架的波导和放置在质量处的波导之间的错位。模拟的机械灵敏度为34.1 /spl mu/m/g。本文还介绍了一种稳定的、健壮的仅由两个光刻步骤组成的技术。通过倾斜加速度计进行静态表征,显示周期性响应,实验光学灵敏度高于6dB/g。
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Surface quad beam polymer optical accelerometer
The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.
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