N. Y. Firsova, E. Mishina, S. Senkevich, I. P. Pronin, I. Bdikin, A. Kholkin
{"title":"金属基板上铁电PZT薄膜的飞秒红外激光退火","authors":"N. Y. Firsova, E. Mishina, S. Senkevich, I. P. Pronin, I. Bdikin, A. Kholkin","doi":"10.1109/ISAF.2012.6297852","DOIUrl":null,"url":null,"abstract":"Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.","PeriodicalId":20497,"journal":{"name":"Proceedings of ISAF-ECAPD-PFM 2012","volume":"107 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Femtosecond infrared laser annealing of ferroelectric PZT films on a metal substrate\",\"authors\":\"N. Y. Firsova, E. Mishina, S. Senkevich, I. P. Pronin, I. Bdikin, A. Kholkin\",\"doi\":\"10.1109/ISAF.2012.6297852\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.\",\"PeriodicalId\":20497,\"journal\":{\"name\":\"Proceedings of ISAF-ECAPD-PFM 2012\",\"volume\":\"107 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of ISAF-ECAPD-PFM 2012\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2012.6297852\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISAF-ECAPD-PFM 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2012.6297852","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Femtosecond infrared laser annealing of ferroelectric PZT films on a metal substrate
Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.
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