C. Cereignani, A. Frangi, S. Lorenzani, A. Frezzotti
{"title":"BGK模型在MEMS流固耦合仿真中的应用","authors":"C. Cereignani, A. Frangi, S. Lorenzani, A. Frezzotti","doi":"10.1109/ESIME.2006.1644007","DOIUrl":null,"url":null,"abstract":"A three-dimensional quasi-static Stokes model, with a correction based on the kinetic theory of rarefied gas, is used to evaluate the damping forces exerted by gas flows on the moving surfaces of micromechanical structures in a wide range of pressures. Numerical results arc compared with the experimental data collected on a silicon biaxial accelerometer in the continuum and transitional flow regimes","PeriodicalId":60796,"journal":{"name":"微纳电子与智能制造","volume":"11 1","pages":"1-7"},"PeriodicalIF":0.0000,"publicationDate":"2006-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"On the application of the BGK model to the simulation of fluid structure interaction in MEMS\",\"authors\":\"C. Cereignani, A. Frangi, S. Lorenzani, A. Frezzotti\",\"doi\":\"10.1109/ESIME.2006.1644007\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A three-dimensional quasi-static Stokes model, with a correction based on the kinetic theory of rarefied gas, is used to evaluate the damping forces exerted by gas flows on the moving surfaces of micromechanical structures in a wide range of pressures. Numerical results arc compared with the experimental data collected on a silicon biaxial accelerometer in the continuum and transitional flow regimes\",\"PeriodicalId\":60796,\"journal\":{\"name\":\"微纳电子与智能制造\",\"volume\":\"11 1\",\"pages\":\"1-7\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"微纳电子与智能制造\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2006.1644007\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"微纳电子与智能制造","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ESIME.2006.1644007","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On the application of the BGK model to the simulation of fluid structure interaction in MEMS
A three-dimensional quasi-static Stokes model, with a correction based on the kinetic theory of rarefied gas, is used to evaluate the damping forces exerted by gas flows on the moving surfaces of micromechanical structures in a wide range of pressures. Numerical results arc compared with the experimental data collected on a silicon biaxial accelerometer in the continuum and transitional flow regimes
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