受昆虫钟形感受器启发的微机械仿生应变传感器的制造和初步表征结果

D. Wicaksono, G. Pandraud, G. Craciun, J. Vincent, P. French
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引用次数: 7

摘要

在本报告中,我们介绍了一种新型微机械仿生应变传感器的初步制造和表征结果。这种新型应变传感器的结构灵感来自于昆虫中发现的天然应变传感器,通常被称为钟形感受器。Campaniform sensillum的高灵敏度应变传感能力除其他外,还得益于其孔结构和隐窝膜结构特征。从以往的连续统宏观力学研究中,我们已经知道孔洞结构对应力的放大作用,并且孔洞结构大多成为裂缝的起点。我们首次从Campaniform senillum的这些结构特征中获得灵感,制备了微机械硅基应变传感结构。在我们对这些仿生硅基微结构的初步光学表征结果中,证实了孔结构特征放大和集中了应变。因此,应变传感装置的进一步应用是可行的。
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Fabrication and initial characterisation results of a micromachined biomimetic strain sensor inspired from the Campaniform sensillum of insects
In this report, we present our initial fabrication and characterisation results of a new micromachined biomimetic strain sensor. The new strain sensor is structurally inspired from the natural strain sensor found in insects, commonly called Campaniform sensillum. The high-sensitivity strain sensing capability of Campaniform sensillum is among other things due to its hole-structure, as well as its membrane-in-recess structural features. From previous works in continuum macromechanics, it is widely known that hole-structure amplifies stress and mostly becomes a crack starting point. We fabricated for the first time micromachined Si-based strain-sensing structures inspired from these structural features of Campaniform sensillum. In our initial optical characterisation results of these biomimetic Si-based microstructures, it is confirmed that the hole structural feature amplifies and concentrates strain. Thus, further application for a strain-sensing device is feasible.
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