ZnO薄膜厚度对一氧化碳气体传感器影响的研究

J. Agrawal, Mayoorika Shukla, Vipul Singh
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摘要

在这项工作中,采用溶液工艺技术制备了一种简单廉价的ZnO薄膜一氧化碳气体传感器。为了改变ZnO薄膜的厚度,将两种不同摩尔浓度的前驱体溶液3M和5M自旋涂覆在玻璃衬底上。当一氧化碳浓度为50ppm时,3M ZnO薄膜器件的传感响应性能比5M ZnO薄膜提高了两倍以上。此外,发现3M ZnO薄膜在低一氧化碳浓度下表现更好,而5M ZnO薄膜在更大的一氧化碳浓度范围内表现出线性响应。本文对气敏机理和膜厚对器件性能的影响进行了深入的研究和讨论,为设计和开发轻便、高灵敏度的金属氧化物基气敏传感器打开了大门。这篇文章受版权保护。版权所有。
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Investigation of the Effect of ZnO Film Thickness Over the Gas Sensor Developed for Sensing Carbon Monoxide
In this work, a facile and inexpensive ZnO thin film‐based Carbon monoxide gas sensor has been fabricated using a solution‐process technique. To vary the thickness of ZnO thin films, the precursor solutions of two different molarities, 3M and 5M have been spin‐coated over glass substrates. The 3M ZnO thin film device has demonstrated more than two times improvement in sensing response as compared to 5M ZnO films, for 50 ppm Carbon monoxide concentration. Additionally, The 3M ZnO film was found to perform better for low Carbon monoxide concentrations, whereas the 5M ZnO film showed a linear response over a wider range of Carbon monoxide concentrations. The gas sensing mechanism and the impact of film thickness on the performance of the device have been thoroughly studied and discussed, which may open the doors for the design and development of facile and high‐sensitivity metal oxide‐based gas sensors.This article is protected by copyright. All rights reserved.
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