亚纳米世界的分析能力

M. Wiederspahn
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引用次数: 4

摘要

近年来,有一个持续的趋势是设计专门的扫描电子显微镜,专门用于特定的应用。因此,SEM市场上出现了两种不同的系统配置:一种配置专门用于提供高分辨率成像。另一个配置专门用于优化分析性能。然而,这两条不同的发展路线迫使用户决定是否将他们的研究限制在高分辨率成像或优化的分析调查。随着新的Merlin的推出,卡尔蔡司现在已经推出了一个优化的解决方案,满足两个要求:高分辨率和分析需求。其成像系统最大二次电子检测分辨率为0.8 nm,最大探针电流为300 nA,结合了丰富的分析能力。
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Analytical Power for the Sub‐Nanometer World
In recent years there has been an ongoing trend to design specialized scanning electron microscopes, dedicated to specific applications. As a result two different system configurations in the SEM market have emerged: One configuration is dedicated to deliver high resolution imaging. The other configuration is dedicated to optimized analytical performance. However, these two diverging development lines force users to decide whether they will limit their research to high resolution imaging or optimized analytical investigations. With the introduction of the new Merlin, Carl Zeiss now has launched an optimized solution fulfilling the requirements for both: the high resolution and the analytical needs. Its imaging system attaining a maximum secondary electron detection resolution of 0.8 nm combines a wealth of analytical capabilities based on a maximum probe current of 300 nA.
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