基于环形辅助马赫-曾德尔干涉仪的高灵敏度硅光学折射率传感器

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-08-01 DOI:10.1109/OMN.2013.6659093

Tian-ling Zhang, Bo Li, C. Ho, Chengkuo Lee

{"title":"基于环形辅助马赫-曾德尔干涉仪的高灵敏度硅光学折射率传感器","authors":"Tian-ling Zhang, Bo Li, C. Ho, Chengkuo Lee","doi":"10.1109/OMN.2013.6659093","DOIUrl":null,"url":null,"abstract":"This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"High sensitive silicon optical index sensor based on Ring-assisted Mach-Zehnder interferometer\",\"authors\":\"Tian-ling Zhang, Bo Li, C. Ho, Chengkuo Lee\",\"doi\":\"10.1109/OMN.2013.6659093\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659093\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659093","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文介绍了基于环形辅助马赫-曾德尔干涉仪(RA-MZI)光学传感器的设计与制作。测量结果表明，自由光谱范围(FSR)为5 nm，最高q因子为2000。时域有限差分(FDTD)仿真结果表明，该传感器对环境折射率变化的感知灵敏度为137.5 nm/RIU。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

High sensitive silicon optical index sensor based on Ring-assisted Mach-Zehnder interferometer

This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2013 International Conference on Optical MEMS and Nanophotonics (OMN)

自引率

0.00%

发文量