{"title":"面向全聚合物气体检测系统的三维组合热解聚合物传感器和加热器","authors":"O. Jeong, S. Konishi","doi":"10.1109/MEMSYS.2007.4433027","DOIUrl":null,"url":null,"abstract":"This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system\",\"authors\":\"O. Jeong, S. Konishi\",\"doi\":\"10.1109/MEMSYS.2007.4433027\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433027\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433027","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system
This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.
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