基于亚波长光栅的3.3 V可变传输衰减器

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659082

H. Honma, Kazuhiro Takahashi, H. Ishii, M. Ishida, K. Sawada

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引用次数: 2

摘要

提出了一种基于低驱动电压间隙可变亚波长光栅的纳米机电系统可变传输衰减器。一组平行板致动器部署在通孔上。在775 nm波长处，当驱动电压为3.2 V时，透射光强由63.3%下降到46.5%。

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A 3.3 V operated variable transmission attenuator based on subwavelength grating

This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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