干涉仪传递函数测试方法

孙鸽 Sun Ge, 马冬梅 Ma Dongmei, 张海涛 Zhang Hai-tao
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引用次数: 1

摘要

为了获得干涉仪的空间频率响应,研究了干涉仪的仪器传递函数(ITF)的测试方法。首先,建立了成像系统仪器传递函数的理论计算模型,并利用镜头设计程序对菲索干涉仪的测试模型进行了仿真。然后对理论值进行了计算和分析。将基于正弦相位板法的ITF与理论ITF进行比较,误差小于0。通过光学设计程序的仿真验证了该方法的可行性。
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Interferometer instrument transfer function testing method
To acquire the spatial frequency response of the interferometer,the testing method on instrument transfer function( ITF) of interferometer was researched. First,the theoretical calculation model of instrument transfer function of imaging system was established,and the testing model of Fizeau interferometer was simulated via lens design program. Then the theoretical value was calculated and anaysed. Comparing ITF based on the method of sine phase plate with the theoretical ITF,the error is less than 0. 6%,and this method is proved to be feasible via the simulation of the optical design program.
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