D. Yntema, R. Wiegerink, J.W. van Ffonschoten, M. Elwenspoek
{"title":"完全集成三维声强传感器","authors":"D. Yntema, R. Wiegerink, J.W. van Ffonschoten, M. Elwenspoek","doi":"10.1109/MEMSYS.2007.4433010","DOIUrl":null,"url":null,"abstract":"For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"51-54"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Fully integrated three dimensional sound intensity sensor\",\"authors\":\"D. Yntema, R. Wiegerink, J.W. van Ffonschoten, M. Elwenspoek\",\"doi\":\"10.1109/MEMSYS.2007.4433010\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"25 1\",\"pages\":\"51-54\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433010\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433010","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fully integrated three dimensional sound intensity sensor
For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.
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